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1100 ºC Dual Zone Tube Furnace with 11" Quartz tube and Vacuum Flanges ( 24" heating zone) - GSL-1100X-II-11

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Item Number: GSL-1100X-II-11
Transported by LTL Freight (Truck)

Personalization

Upgrade to Eurotherm Temperature Controllers (Dual zone)
GSL-1100X-II-11  is a two zone 11" O.D fused quartz tube furnace with vacuum flange. It is widely used for material or chemical lab to sinter all types of new material samples and anneal semiconductor wafers  (max. 8") under vacuum or other gases condition. The temperature of the furnace is controlled by a high precision controller with accuracy of +/-1°C and 30 segments programmable up to 1100°C .

SPECIFICATIONS

Furnace structure
  • Double layer flange with water cooling
  • Total 24" heating zone length
  • Two water cooling flange installed to keep the temperature low on the flange, water chiller need to purchase separately. Please contact us for more infomation.
  • High purity alumina fibrous insulation structure for max energy saving
Input voltage 208 - 240V AC Single phase
Power 8kW (50Amps Air Breaker is required)


Fused quartz tube size
  • One quartz tube is  included:279 O.D x 269 I.D x 1000mm Length (11" O.D x 10.6" I.D x 40" L)
  • The tube can hold an 8" wafer boat, pls click the picture below to order quartz boat or flat sample order
             click here to choose a crucible
Heating element NiCrAl Resistance Wire

Working Temperature
  • Max. heating temperature: 1150°C (< 30min)
  • Continuous working temperature: 400 -1100°C
  • Max. heating/cooling rate: 20°C/min 



Heating zone
  • Two heating zones, each zone 300mm ( 12" ) long
  • Total heating zone length: 600mm (24'')
  • constant temperature zone: 300mm at the center (with +/-1°C) ( if set up two zones at the same temperature )
  • Two foam ceramic blocks with alumina coating are included, which must be placed inside tube as shown in the picture below (Optional quartz block is available at extra cost, please click here to order)
                   

Temperature controller

  • Two Precision digital controllers with PID function and 30 segments programmable
  • Secondary temperature monitor has the function of protection from over-temperature and broken T/C
  • K type T/C
  • Temperature accuracy: +/-1°C
  • Software and PC interface module is available at extra cost
  • The eurotherm Temperature controller is available at the extra cost, which can reach +/- 0.1°C accuracy.  

               



Vacuum &Fitting Ports
  • One pair of hinged type stainless steel vacuum seal flange with water cooling
  • One mechanical gauge is included
  • Two stainless steel needle valves & 1/4" hose fittings, KF25 vacuum port and 1/4'' feedthrough. Vacuum pressure limit: depending on the vacuum pump. (Usually 10-2 torr by the mechanical pump).
  •             
Water Chiller (Optional)
  • Cooling water is required.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately here) to save water. 
 
Product dimension

55"L x 27"W x 38" H  mm

Net weight 250Kg
Shipping dimension 68" x 60" x 55"
Shipping weight 350Kg
Warranty One year limited warranty for the electronic and mechanical part, excluding consumable parts such as heating elements and quartz tube.
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note:  The software is only compatible with MTI’s Yudian Temperature Controller
  •     



Certificate
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • NRTL or CSA certification is available upon request at extra cost (pls click marks below to learn details )
                       
Application Notes
  
Click here to learn the installation of a gas regulator.
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gases should be limited to < 200 SCCM (or 200mL/min) for reducing thermal shocks to the tube. 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.


Operation Instructions & Video
              

OPTIONAL ACCESSORIES

Part No.
Description
Link
EQ-KF-suite
KF-D25 series Vacuum Suite(vacuum pump, vacuum ball valve, vacuum bellows, quick clamps, KF adapter) Also you may buy individually.
EQ-MTS02 Computerized temperature Control System
High vacuum station (Mechanical pump + turbo molecular pump.)
Gas mix station (Float flow meter / Mass flow meter)(2, 3, 4channels selectable)
Quartz Boats /curcible /container /sample holder

EQ-QTB-11

Quartz thermal block

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.