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1100 ºC Dual Zone Tube Furnace with 11" Quartz tube and Vacuum Flanges ( 24" heating zone) - GSL-1100X-II-11

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Item Number: GSL-1100X-II-11
Transported by LTL Freight (Truck)

Personalization

Upgrade to Eurotherm Temperature Controllers (Dual zone) + 15" Laptop + Accessories Kit
GSL-1100X-II-11  is a two zone 11" O.D fused quartz tube furnace with vacuum flange. It is widely used for material or chemical lab to sinter all types of new material samples and anneal semiconductor wafers  (max. 8") under vacuum or other gases condition. The temperature of the furnace is controlled by a high precision controller with accuracy +/-1°C and 30 segments programmable up to 1100°C .

SPECIFICATIONS

Furnace structure
  • Double layer steel casing with air cooling
  • Total 24" heating zone length
  • Two cooling fans pre-installed to keep temperature of outside case < 70 ºC
  • High purity alumina fibrous insulation structure for max energy saving
Input voltage 208 - 240V AC Single phase
Power 8kW (50Amps Air Breaker is required)


Fused quartz tube size
  • One quartz tube is  included:279 O.D x 269 I.D x 1000mm Length (11" O.D x 10.6" I.D x 40" L)
  • The tube can hold a 8" wafer boat , pls click picture below to order quartz boat or flat sample order
             click here to choose a crucible
Heating element NiCrAl Resistance Wire

Working Temperature
  • Max. heating temperature: 1150°C (< 30min)
  • Continuous working temperature: 400 -1100°C
  • Max. heating/cooling rate: 20°C/min 



Heating zone
  • Two heating zones, each zone 300mm ( 12" ) long
  • Total heating zone length: 600mm (24'')
  • constant temperature zone: 300mm at the center (with +/-1°C) ( if set up two zones at the same temperature )
  • Two foam ceramic blocks with alumina coating are included, which must be placed inside tube as shown in the picture below (Optional quartz block is available at extra cost, please click here to order)
                   

Temperature controller

            



Vacuum &Fitting Ports
  • One mechanical gauge is included
  • Two stainless steel needle valves & 1/4" hose fittings, KF25 vacuum port and 1/4'' feedthrough. Vacuum pressure limit: depended on the vacuum pump. (Usually 10-2 torr by mechanical pump).
  • Observation quartz window with water cooling flange is available upon request at extra cost (pic right)   
Cooling Two 20mm air cooling fans help dissipate heat of the flange and furnace case 
Product dimension

1000L x 680W x 920 H  mm
See the illustration to the left to for dimension detail with additional parts.
Net weight 250Kg
Shipping dimension 68" x 60" x 55"
Shipping weight 350Kg
Warranty One year limited warranty for the electronic and mechanical part, excluding consumable parts such as heating elements and quartz tube.


Certificate
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost (pls click marks below to learn details )
                       
Application Notes
  
Click here to learn the installation of a gas regulator.
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gases should be limited to < 200 SCCM (or 200mL/min) for reducing thermal shocks to the tube. 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.


Operation Instructions & Video
              

OPTIONAL ACCESSORIES

Part No.
Description
Link
EQ-KF-suite
KF-D25 series Vacuum Suite(vacuum pump, vacuum ball valve, vacuum bellows, quick clamps, KF adapter) Also you may buy individually.
EQ-MTS02 Computerized temperature Control System
High vacuum station (Mechanical pump + turbo molecular pump.)
Gas mix station (Float flow meter / Mass flow meter)(2, 3, 4channels selectable)
Quartz Boats /curcible /container /sample holder

EQ-QTB-11

Quartz thermal block

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.