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4" Polishing Fixture With Vacuum Jig for Precision & Automatic Thinning and Polishing- EQ-PF-4-1P

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Item Number: EQ-PF-4-1P
  • Precision Polishing Jig for accurate wafer / substrate polishing and back-thinning
  • Thickness control screw fixture with resolution of 0.005 mm to limit stock remove
  • This Polishing fixture can be fit with Unipol 1202 and 1502 and any precision 12" or larger polishing machine with York support to achieve automatic polishing or lapping.
  • Super-hard tungsten alloy is weld on the bottom of jig for polishing resistible
  • Maximum sample thickness: 13mm
  • Maximum travel distance: 14mm
Sample Holder Vacuum chuck
  • Maximum size of wafer  or substrate is 4"
  • If the thickness of the sample is greater than 0.15 mm, adopt vacuum absorption. If the thickness is less than 0.15 mm, use wax.

Digital Micrometer
  • One digital micrometer is included with the resolution of +/- 1 micron for more accurate lapping.
Pressure Indicator
  • One digital balance is included for measuring the fixture weight ( pressure ) 
  • Weight can be adjusted by screws while measuring on the digital balance from 1g to 2000g.
Vacuum Absorption and Filter
  • Require a vacuum pump with rate > 70 L/ min.
  • To protect the vacuum pump from any moisture and liquid, connect the filter between fixture and pump.
Size O.D: 146mm; Height: 266mm
Operational Instructions  
Application Notes Please clicks on here to download  how to use this fixture.
Optional Accessories A vacuum pump required for vacuum absorption, please order separately.
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