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500ºC Vacuum Lamination Press with Two 5.3"x5.3" Heating Plate and Electric Hydraulic Pump - YLJ-VHP5-4


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Item Number: YLJ-VHP5-4
Transported by LTL Freight (Truck)

YLJ-VHP5-4 (update from EQ-VHP-5T-4) is a CE Certified electric vacuum lamination hot press designed for wafer bonding or thin film transformations up to 100mm x 100mm. It has the max. working temperature of 500ºC along with the max. the pressure of  20 Metric Tons.
Update: MTI YLJ series Pressers were CE approved on Mar. 2015


SPECIFICATIONS:


Structure   
 

  • Two 135 x 135 mm flat heating platens made of  high-temperature resistant Cr steel with max. working temperature of 500ºC
  • 1000W Heating element is inserted into the center of the heating plates for fast heating
  • Max. Load on 135x135mm Heated Platen:
    • 10 Metric Tons at 500°C  ( 55 kg/cm2 )
    • 20 Metric Tons at RT   ( 110 kg/cm2 )
  • Two precision temperature controllers which control two heating plates separately with 30 programmable segments 
  • Water cooling jackets are built on the both top & bottom of the heating plates for assisting cooling
             



Hydraulic Pump

  • Modified electric hydraulic press is connected to a vacuum chamber.
  • Max. travel distance of the bottom ram: 15 mm
  • Automatic max. pressure controlled via a digital pressure gauge
  • Pressure accuracy: +/-0.01 Mpa ( 0.1 kg/cm²)
  • Two flat heating plates are installed with water cooling plates for Max. 500ºC working temperature
  • Max. opening of the pressing platen: 30mm
  • Water cooling  (>15L/min) is required to cool the heating plates when the operating temperature is over 200 ºC. 




Temperature control and Pressure Display
   

  • Two precision temperature controllers with 30 programmable segments control the heating plates separately with +/1°C accuracy. 
  • The temperature controllers have PID auto-tune function, over-temperature protection and thermal couple broken protection
  • Max. Temperature: 500°C with inert gas or vacuum with accuracy +/-1°C
  • Max. Heating rate:  2.5°C/min
  • Software and PC interface is built in the controller, which can be connected to a PC for computer controlling via a RS232 connector ( click picture left to see details )
  • Digital pressure meter ( controller ) is built outside the vacuum chamber. You can set pressure at the desired value which can stop the electric hydraulic press automatically            



Vacuum Chamber
   

  • Electric hydraulic press and heating plates are placed inside the vacuum chamber
  • Vacuum chamber is made of SS304 with the size: 525Lx480Wx450H (mm)
  • Vacuum chamber Capacity : about 75 Liters. 
  • 300mm dia. vacuum sealed  hinged type door with 150mm Dia. quartz glass window is installed for easy sample loading and observation
  • Silicone O-ring can be used for all vacuum sealings 
  • One precision digital vacuum gauge ( 10E-4 torr ) is installed on the vacuum chamber 
Power Requirement

  • Power consuming:  2500 W
  • Power input: 208 - 240V AC, 50/60 Hz single phase
Water cooling
  • One recirculating water chiller for the cooling heating plate from over-heated and faster cooling. Please order separately at extra cost.
  • Please click picture left to link to detail specifications
Shipping Dimensions
  • 47"x39"x71"

Options

  • Optional equipment is available at extra cost:
  • Vacuum level for mechanical pump can reach <5 x10E-2 Torr, and can reach 10-4 torr with quality turbopump (Pleases click the picture left to choose one)       
  •     




Operation Instructions

               

Compliance

  • CE Certified


Application Notes

Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.

Dimensions

Over-all: 775mm(L) x 550mm(W) x 1325mm(H) 
(Click the Picture left to review detailed size)
Warranty
  • The pressing machine was quality inspected in USA and lifetime support is provided
  • One year limited standard warranty (Extended warranty is available up to 5 years at extra cost) 

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.