500W 13.56MHz PECVD RF Power Supply for 2''-3.14'' (50-80mm) OD Tube Furnace OTF-PECVD-RF

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Sale Price: USD$32,950.00

In stock

Item Number: OTF-PECVD-RF

4 -6 weeks to delivery for QC

Quantity:

500W / 13.56MHz RF power supply for PECVD (Plasma Enhanced Chemical Vapor Deposition).

Specification

Noise: <50 dB.

Output Power: 5 -500W adjustable with ± 1% stability.

RF frequency: 13.56 MHz ±0.005% stability.

Reflection Power: 200W max.

Matching: Automatic

RF Output Port: 50 Ω, N-type, female

Cooling: Air cooling.

Power : 208-240VAC, 50/60Hz

Tube Size: 50 - 80 mm (2''-3.14'' OD)

Combine with MTI's tube furnace to get PECVD system

Click the video here to see the PECVD operation

Optional:
Please order the oiless pump for zero contamination:

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