Browse Categories
Search

300W 13.56MHz RF Generator for 50, 80 or 125 mm OD Tube Furnace - OTF-PECVD-RF


4 -6 weeks to delivery for QC

Product Options

Tube Size:
13.56MHz RF generator up to 300W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.

SPECIFICATIONS

Noise <50 dB
Output Power 5 -300W adjustable with ± 1% stability
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic matching
RF Output Port 50 Ω, N-type, female
Cooling Air cooling
Power 208-240VAC, 50/60Hz
Tube Size 50, 80 or 125 mm OD please select from option bar  ( larger diameter coil up to 11" diameter is available upon request )
Application Combine with MTI's tube furnace to get PECVD system

Dimension


Optional
Please order the oilless pump for zero contamination, quartz tubes, and vacuum flanges can be ordered by clicking the pictures below:
     Sealing flanges for 40 - 42 mm O.D tube     1



Demo Video

Warranty  One year limited warranty with lifetime support

Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop

MTI-UCSD Battery Fabrication Lab


MTI Sponsors the Postdoctoral Awards

Upcoming Shows:
AiMES 2018 Sept 30 - Oct 4 Cancun Mexico

Furnaces North America Oct 8-10 Indianapolis, IN Booth 242

MS&T 2018 Oct 14-18 Columbus OH Booth 513

Recent Attended Shows:
Zhejiang University MSE Visiting August 10th Richmond CA

ICM 2018 July 16-20 San Francisco CA


ICT 2018 July 1-5 Caen France


AABC 2018 June 4-7 San Diego CA

Click here to see our past conferences

 

Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.