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Two Channels ALD 4" Tube Furnace System Upto 1200oC - ALD-1200X-4


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Item Number: ALD-1200X-4
Transported by LTL Freight (Truck)
ALD-1200X-4 is a 4" tube furnace combining with two channel ALD valves and one channel liquid vapor delivery( Atomic Layer Deposition ) and as well as four channels gas delivery system for CVD growth of nanomaterial and pi film,   The smart design makes ALD  more cost effective and affordable for every research group.

SPECIFICATIONS:

Control Pannel
  • All parameters of  ALD vapor puls time , and  Gas flow  are controlled by PLC via a 6" touch screen panel in a mobile cart 
    • Control Two  ALD valves with puls duation time and cycling with   mico-second precision
    • Control For channels gas delivery with ±0.2%F.S via MFC
    • Display vacuum pressure 
    • Other parameter upon request of customer
  • Please click picture below to see control interface
  
ALD valve
  • Two ALD valves with pulse controller  (min 10 ms duration )
  • Capable of heating with thermal actuators
Liquid-Vapor Generator
  • Automatic liquid vapor generator is included and connect to  ALD valve
Dual Zone Split Tube furnace 

  • Max 1100ºC for continuous heating
  • Two programmable precision digital temperature controllers with 30 segments.
  • Two separate controlled Heating Zones
    • 200mm length for each heating zone
    • 400mm total in heating length
    • 250mm constant central temperature heating area if both zones were heated at the same temperature
    • 500ºC max temperature difference between two zones with thermal blocks in between
  • Input power: 208 – 240V AC input, single phase at max. 4KW
  • Optional:  ALD control system can be installed with a short tube furnace or rotation tube furnace as picture below
  •                    
Anti-corrosive Pressure Gauge

  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detail spec.
Vacuum Pump 
( optional)
  • 10E-2 Torr vacuum can be achieved inside processing tube
  • Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below
  •       


More Bubbler
Optional


                    
                       
Update Idea 
  • You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD  and ALD+PVD+CVD system to grow complex materials and Powder ALD with rotation furnace
  • ( PE-ALD+CVD)            ( PE-ALD+PVD +CVD)
Warranty
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance
  • Built-in Pfeiffer's pump is ELT Certification
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. ( please click marks below to learn details )
      
Application
Operation Insturctions
    

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.