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Bubbler / Evaporator for Liquid Precursors Delivery in CVD Processes (150, 300, 600 or 1000ml optional) - BL-SS

Sale Price: Starting at USD$669.00
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In typical CVD processes, The Bubbler/Flash Evaporator is used for transporting chemical precursors and liquid sources in the vapor phase. Such a unit features two stainless steel needle valves with 1/4'' Tube Fittings allow carrier gas bubble through the liquid sources to enhance evaporation. Its leak-free 316 Stainless Steel vessel is able to withstand pressure up to 0.15Mpa @ 250°C.   Please choose150mL, 300mL, 600mL and 1000 mL at product option bar.






Vessel Volume  150ml 300ml 600ml  1000ml
Vessel Dimensions

Inner: Φ45 x  84mm
Outer: Φ51 x  104mm
Inner: Φ45 x 180mm 
Outer: Φ51 x 187mm
Inner: Φ70 x 154mm
Outer: Φ76 x 200mm
Inner: Φ70 x 258mm
Outer: Φ76 x 300mm
Max. Working Temp. 150°C 150°C 250°C 250°C

(Price: RFQ)

(Power: 500W, Belt Height 50mm)
Overall Dimensions 130 x 70 x 340mm (L x W x H) 130 x 70 x 440mm (L x W x H) 130 x 90 x 440mm (L x W x H) 130 x 90 x 540mm (L x W x H)
Heating Capability Optional Heating Jacket EQ-HC-BL with build in K-type thermocouple (Seperate Product)

Vessel Material 316 Stainless Steel
Pressure Gauge -0.1 ~ 0.15 Mpa
Max. Pressure 0.15Mpa
Fittings Two SS needle valves with 1/4" Tube Fittings

Application Notes
  • Vessel should be cleaned after each use to prevent contaminants and bacteria build up.
  • Never heat the source liquid inside the vessel near its boiling point without opening valve
  • You may order  precision MFC to deliver vapor ( click picture below-left 1 )
  • Please (click the picture below-right 3) to see our updated   Compact Liquid Vaporization Systems for CVD
  • Please click to choose MTI CVD furnaces to build your own system.     

Application Instruction
Warranty One year limit manufacture warranty with lifetime tech. support

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1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.