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Two Zones CSS Furnace for Rapid Thermal Processing upto 5" Dia Wafer at Max.800°C - OTF-1200X-RTP-II-5


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Item Number: OTF-1200X-RTP-II-5
Transported by LTL Freight (Truck)

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OTF-1200X-RTP-II-5  is a rapid thermal processing furnace with 11" I.D. quartz chamber. It is designed for Thermal Evaporating or CSS (Close Spaced Sublimation) film coating up to 5" Dia. circular samples and 800°C Max. The furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 10ºC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1ºC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC. It is an excellent tool to research new generation thin film for solar cells, such as CdTe, Sulfide, and Perovskite solar cell. 

SPECIFICATIONS:
Furnace structure & Vacuum Chamber

  • Two temperature controllers.
  • The chamber is made of high purity fused quartz tube.
  • Quartz tube size: 11" OD/10.8" ID x 9" H
  • The vacuum flanges are made of Stainless Steel 316.
Vacuum Flanges
 
  • Top Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily.
  • Bottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valves.
  • The flange is sealed by double silicone o-rings and can achieve max. the vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately).
  • One digital vacuum gauge is installed on the top flange.  
  • Precision anti-corrosion digital vacuum gauge is in standard package (Since 2016.03.24).
Gas Flow Control


Gas mixer integrated with two float-meters with adjustable measurement ranges of 
16 -160 mL/m 
Heater and Sample Holder


  • Two independently controlled heaters with a manually adjustable gap from 2 - 30 mm. 
  • 20 pcs Halogen lamps are used as the heating element for rapid thermal processing.
  • Heaters are is made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling.
  • 5" Dia. the circular wafer holder is built into the top heater for holding the substrate.
  • One set of high thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) are included (place on the back of the substrate to make it heat uniformly).
  • A 16L/min circulating water chiller is included for saving water source ( click the picture below to see detailed specs).
                              

Temperature Controller


  • Two precision digital temperature controllers with 30 segments programmable offer independent control of the top and bottom heaters.
  • Each controller has PID autotune function to protect heaters from overshooting and an alarm function to avoid overheating and a thermal couple are broken.
  • PC communication interface & software is installed for (click the picture below for details) recording temperature profile shown as below.
  •               


Working Temperature
  • Maximum temperature for each heater: <= 800ºC.
  • Maximum temperature difference between two heaters: <= 300ºC depends on the spacing between two heaters:
    • Spacing 30mm       Max. temp difference:  315ºC @ heating bottom only
Heating & Cooling Rate
  • Heating: < 8ºC/s ( heating single heater only )
  • Cooling: < 10ºC/s (600 - 100ºC) Max.
Thermal Couple Two K-type thermal couples are installed on top and bottom heaters separately.
Working Voltage 220VAC, Single Phase, 60A Air Breaker required
Power Requirement 9.5KW total 
Dimensions

1085mm L x 680mm W x 1710mm H
Shipping Weight & Dimension
  • Two pallets: 525 lbs   and 48" x 40" x 87" and 165 lbs with 39x31x29" dimension




Optional

  • One vacuum pump is required. Please order separately by clicking the first picture from the left below. Vacuum level can reach < = 10E-2 torr by mechanical pump. 
  • If you run corrosive gas, please consider to use the anti-corrosive dry pump is shown in the second picture from the left below ( Pfeiffer pump from Germany ) at extra cost.
  • You may choose digital MFC gas delivery system by clicking the first picture from the right below.
                               
Warranty One year limited with lifetime support ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty).
Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply.
  • Temperature controller is MET and CE Certified.
                       
Operation Instructions           

Application Notes & Warnings

     
  • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube.
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The foot-stand of this furnace is designed for short distance hauling on the even surface 
References
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