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Compact 4" RTP Tube Furnace System with Turbomolecular Vacuum Station & Complete Acessories (up to 1E-4 torr & 1100C ) - OTF-1200X-RTP-HV-LD

In stock
Item Number: OTF-1200X-RTP-HV-LD
Transported by LTL Freight (Truck)


Optional Accessory
Product Description

Compact 4“ RTP Tube Furnace with High Vacuum Station & Complete Accessories (up to 10^-5 torr & 1100C ) - EQ-OTF-1200X-4-RTP-HV-UL

OTF-1200X-RTP-4-HV is a UL certifiable compact rapid thermal processing tube (4" I.D.) furnace with High Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. The furnace is heated by 8 units of 1KW halogen light around the processing tube with a max. heating rate of max. 50C/second. 50 segments precision temperature controller is built in with accuracy +/-1° C. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.  

Compact 4“ RTP Tube Furnace(Double layer steel case mullite liner)
Heating element
8 pcs Halogen light tube (D=10 L=300 T =200, mm)
Working Temp.
1100° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting )
Max heating rate 50°  C/sec
Max cooling rate 64° C/min (Under vacuum: 200 mtorr), 117° C/min (Under atmosphere pressure) 
Heating zone
12" length with 4" constant temperature zone within +/-1°C uniformity
Program Temp. Controller

  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
  • Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • PC Control:  
    • MTS-02 control module is included for PC control on this furnace.
    • The new version of PC module is now compatible with Lab View 05/08/2014
    • A laptop PC can be ordered for $900 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here.

Quartz Tube & Sample Holder
  • Quartz Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length
  • 3" diameter Sample holder is inserted to sliding flange, which is made of quartz
  • One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia.
  • AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
  • The sample holder is removable from flange
Vacuum flange
KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.
Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.
Water Cooling Jacket
  • Cooling water is required.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.   

Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.

Flow meter
One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min
Power input
208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)
HV Station
High Vacuum Station

  • Mobile cart size:  600 (L) x 600 (W) x 700(W), mm
  • Max. Loading:       600 Lbs on top
  • Molecular pump control Panel :   LCD digital
  • Diaphragm Pump and  Turbo Molecular Pump are installed inside the steel case. 
Vacuum Degree
6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)
Control panel
  • One button operation - the diaphram pump and the turbo molecular pump will start after pressing "start" button.
  • System controlled spining speed - the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber.
  • Self protection - the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum. 
  • LCD screen - double lines parameters checking interface make the working easier to be handled.
       Self testing
Spinning up
Start-up time
2 minutes
Backing Pump Volume Flow Rate at 10 mbar
3.8 L/min for 50Hz and 4.4 L/min for 60Hz
Power input
110V AC or 220V AC switchable, 50/60Hz
Power consumption
Duration/Max power: 100/110Watt
Shipping Info
Weight and Dimension
RTP furnace: 110 lbs,  760 x 330 x 530mm (30" x 13" x 21" inch) L x W x H
HV station: 40 lbs,  600 x 600 x 700mm (24" x 24" x 28") L x W x H
Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller


  • CE Certified
  • The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost. Please contact us for quote and detail information. 
  • Temperature controller is MET and CE Certified
  • High Vacuum Station is TUV Certified
Application Notes

Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
Operation Instructions         
    Standard package
      Item No.
      EQ-PV-HVS Compact Turbo molecular Vacuum Pump Station
      Temperature PC control system (cable and software)
      Sample Holder for RTP Furnace
      Aluminum Nitride Substrate for PTP Furnace
      1 pc
      Quartz Tube: 4.33" O.D x 4.05" I.D x 16.2" Length for RTP Tube Furnace (installed)
      1 pc
      Quartz heat shield disk
      4 pc
      Halogen light (heating elements)
      8 pc

      High Temperature Silicone O-ring (Ø108) 6 pc

      High Temperature Silicone O-ring (Ø118) 3 pc

      20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI
      1 pc
      KF-25 Vacuum right angle valve
      1 pc
      EQ-KF-Clamp-D25 Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter 4 pc
      EQ-KF-Clamp-D40 Quick Clamp with Rubber O-Ring for KF-D40 Vacuum adapter 3 pc
      RU-KF40-25 KF40 to KF25 Reducer Union RU-KF40-25
      1 pc
      EQ-KF-Pipe-D25 KF-D25 Flexible Stainless Steel Vacuum Hose ( Bellows ) (1000mm +600mm)
      2 pc
      Compact Digital Vacuum Gauge
      1 pc
      63 A Fuse
      2 pc
      4 A fuse
        • You must implement cooling water during operation.
        • Please make sure the flow rate  of cooling water >= 3L/min, water temp. < 20oC @ pressure > 25 PSI
        • We suggest you use recirculating water chiller as cooling system (please order separately at the related product below) to save water.
        • You can use flowing tap water as cooling source at flowing rate > 8 Liter/minute.
        • Warning 1: With the normal tap water as cooling source, this RTP furnace's Max holding time shall be less than 600 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.
        • Warning 2: With the recommended recirculating water chiller as cooling system, this RTP furnace's Max holding time can last 1200 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.
        • Optional for upgrade:  You may choose our gas mixer to replace mobile cart  for better gas control- ( please order at the the related product below)

                   Water cooling chiller                          Gas mix station

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