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Compact 4" RTP Tube Furnace System with Turbomolecular Vacuum Station & Complete Acessories (up to 1E-4 torr & 1100C ) - OTF-1200X-RTP-4-HV


In stock
Item Number: OTF-1200X-RTP-4-HV
Transported by LTL Freight (Truck)

Personalization

Optional Accessory
Product Description

Compact 4“ RTP Tube Furnace with High Vacuum Station & Complete Accessories (up to 10^-5 torr & 1100C ) - EQ-OTF-1200X-4-RTP-HV-UL

OTF-1200X-RTP-4-HV is a UL certifiable compact rapid thermal processing tube (4" I.D.) furnace with High Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. The furnace is heated by 8 units of 1KW halogen light around the processing tube with a max. heating rate of max. 50C/second. 50 segments precision temperature controller is built in with accuracy +/-1° C. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.  

Furnace
structure
Compact 4“ RTP Tube Furnace(Double layer steel case mullite liner)
Heating element
8 pcs Halogen light tube (D=10 L=300 T =200, mm)
Working Temp.
1100° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting )
            
Max heating rate 50°  C/sec
Max cooling rate 64° C/min (Under vacuum: 200 mtorr), 117° C/min (Under atmosphere pressure) 
Heating zone
12" length with 4" constant temperature zone within +/-1°C uniformity
Program Temp. Controller











  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
  • Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • PC Control:  
    • MTS-02 control module is included for PC control on this furnace.
    • The new version of PC module is now compatible with Lab View 05/08/2014
    • A laptop PC can be ordered for $900 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here.
                        
          

Quartz Tube & Sample Holder
  • Quartz Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length
  • 3" diameter Sample holder is inserted to sliding flange, which is made of quartz
  • One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia.
  • AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
  • The sample holder is removable from flange
Vacuum flange
KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.
Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.
            
Water Cooling Jacket
  • Cooling water is required.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.   

Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.

Flow meter
One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min
Power input
208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)
HV Station
High Vacuum Station

Structure
  • Mobile cart size:  600 (L) x 600 (W) x 700(W), mm
  • Max. Loading:       600 Lbs on top
  • Molecular pump control Panel :   LCD digital
  • Diaphragm Pump and  Turbo Molecular Pump are installed inside the steel case. 
Vacuum Degree
6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)
Control panel
  • One button operation - the diaphram pump and the turbo molecular pump will start after pressing "start" button.
  • System controlled spining speed - the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber.
  • Self protection - the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum. 
  • LCD screen - double lines parameters checking interface make the working easier to be handled.
           
       Self testing
Spinning up
Start-up time
2 minutes
Backing Pump Volume Flow Rate at 10 mbar
3.8 L/min for 50Hz and 4.4 L/min for 60Hz
Power input
110V AC or 220V AC switchable, 50/60Hz
Power consumption
Duration/Max power: 100/110Watt
Shipping Info
Weight and Dimension
RTP furnace: 110 lbs,  760 x 330 x 530mm (30" x 13" x 21" inch) L x W x H
HV station: 40 lbs,  600 x 600 x 700mm (24" x 24" x 28") L x W x H
Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)
Compliance
  • CE Certified
  • The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost. Please contact us for quote and detail information. 
  • Temperature controller is MET and CE Certified
  • High Vacuum Station is TUV Certified
                        
Application Notes

Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
Operation Instructions         
    Standard package
      Item No.
      Name
      Qty
      Link
      EQ-PV-HVS Compact Turbo molecular Vacuum Pump Station
      1
      EQ-MTS02
      Temperature PC control system (cable and software)
      1
      RTP-ACC-01
      Sample Holder for RTP Furnace
      1
      AIN-Holder
      Aluminum Nitride Substrate for PTP Furnace
      1 pc
      EQ-QZTube-RTP
      Quartz Tube: 4.33" O.D x 4.05" I.D x 16.2" Length for RTP Tube Furnace (installed)
      1 pc
       
      RTP-ACC-02
      Quartz heat shield disk
      4 pc
       
      EQ-RTP-Halogen-light
      Halogen light (heating elements)
      8 pc

      High Temperature Silicone O-ring (Ø108) 6 pc

      High Temperature Silicone O-ring (Ø118) 3 pc

      20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI
      1 pc
      KF-Valve-D25
      KF-25 Vacuum right angle valve
      1 pc
      EQ-KF-Clamp-D25 Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter 4 pc
      EQ-KF-Clamp-D40 Quick Clamp with Rubber O-Ring for KF-D40 Vacuum adapter 3 pc
      RU-KF40-25 KF40 to KF25 Reducer Union RU-KF40-25
      1 pc
      EQ-KF-Pipe-D25 KF-D25 Flexible Stainless Steel Vacuum Hose ( Bellows ) (1000mm +600mm)
      2 pc
      EQ-CVM-211
      Compact Digital Vacuum Gauge
      1 pc
      RT36-00
      63 A Fuse
      2 pc
       
      RT14-20
      4 A fuse
      2
       
      Optional
        • You must implement cooling water during operation.
        • Please make sure the flow rate  of cooling water >= 3L/min, water temp. < 20oC @ pressure > 25 PSI
        • We suggest you use recirculating water chiller as cooling system (please order separately at the related product below) to save water.
        • You can use flowing tap water as cooling source at flowing rate > 8 Liter/minute.
        • Warning 1: With the normal tap water as cooling source, this RTP furnace's Max holding time shall be less than 600 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.
        • Warning 2: With the recommended recirculating water chiller as cooling system, this RTP furnace's Max holding time can last 1200 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.
        • Optional for upgrade:  You may choose our gas mixer to replace mobile cart  for better gas control- ( please order at the the related product below)

                         
                   Water cooling chiller                          Gas mix station

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