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Compact Dry Scroll Pump (60L/min) with Bellows & Clamps, 10E-1 Torr Limit - EQ-AG-IDP3-LD

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Agilent's IDP3 is high-performance compact dry scroll pump which provides clean and oil-free vacuum. It is suitable to be used with MTI Vacuum Ovens, Tape Casting Coaters, and RF Sputtering Coaters.
  • Oil Free:  Eliminate hydrocarbon contaminations in a vacuum system
  • Powerful pumping speed up to 60 liters/minute: Deliver better vacuum than any other pumps of similar size
  • Low noise and vibration levels: Provides quite pleasant work environment
  • Infrequent, low-cost maintenance: Simple tip seal or module exchange requires less than 30 minutes. 
  • Easy integration into any system:  With a small footprint, low weight (21 pounds) and low power requirement, such a pump is easy to accommodate in system design.
  • Complete accessories included for immediate use

Working Voltage
  • 220VAC 50/60Hz
  • 115VAC 50/60Hz
  • 24VDC
(Note: Please select the desired working voltage in the option bar)
Pumping speed
  • 60 L/min, 2.1 cfm (60Hz)
  • 50 L/min, 1.8 cfm (50Hz)
Ultimate pressure 0.1 torr (13.3 Pa)
Max. Inlet Pressure 1 atm
Max. Outlet Pressure 1.4 atm
Exhaust Connection 1/4'' Female NPT with 10mm Hose Barb
Pumping Connection KF16
Gas Ballast Connection 1/8'' Female NPT
Motor Rating 0.12KW
Motor Thermal Protection Auto
Ambient Temperature          5 - 40  ºC
Noise Level 55 dB(A)
Vibration at Inlet 1.5mm/sec
Weight 21lbs
Dimensions for pump
Accessories included
  • One 1 meter long SS  below with KF16 adaptor
  • Two KF16 quick clamps 
Warranty One year (Attention: Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned in below, especially: 
  • Pumping of corrosive or explosive media.
  • Pumping of condensing vapors.
  • Pumping of liquids.
  • Pumping of dust.
  • Operation with improper high levels of insulated heat input.
  • Operation in potentially explosive areas.
  • CSA, CSA/CUA Approved
  • CE Approved
Attentions & Notes
  • Before switching off, isolate the pump from the installation and let it run for 1 hour with gas ballast opened. This procedure can help remove the condensable vapors from the pump and, therefore, keep it healthy for the next run.
  • The ultimate vacuum level achievable by the pump may vary according to the chamber size and sealing condition.
  • To protect the environment & human health, please use Traps & Filters to minimize exhaust. 
  • To protect vacuum pump from damage by condensed vapors or small particles, please connect a cold trap or particle trap to the pump foreline (click pic.1~2 in below for details).
  • Please choose a vacuum gauge. (click pic.3~4 in below for details)
              Pic.1                          Pic.2                          Pic.3                              Pic.4

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