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Compact Auto-Sliding PECVD Tube Furnace with 2"OD Quartz tube and vacuum pump, Max.1200C, - OTF-1200X-50S-PE-SL


Transported by LTL Freight (Truck)

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Model:
OTF-1200X-50S-PE-SL is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with a slideable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace and the integrated slidable rail which allows you preheat and slide the furnace to the sample zone in order to get your sample an instant exposure under high temperature. This system can be updated to advanced model with options. It is an ideal tool for  the researcher to make innovation under a limited budget.
  • Lower temperature processing compared to conventional CVD. 
  • High heating & cooling rate using sliding furnace
  • Film stress can be controlled by high/low frequency mixing techniques. 
  • Control over stoichiometry via process conditions.
  • Can do a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Specifications:
Auto-Sliding Split Tube furnace


two zone heating is available upon request
  • Input power: 208 – 240V AC, 1.2kW
  • 1200°C Max. working temperature for < 60 minutes
  • 1100°C Max for continuous heating
  • High purity quartz tube 2"OD x 1.7"ID x  39.4" Length 
  • 30 segments programmable precision digital temperature controller
  • 8" (200mm), single zone. 2.3" (60mm)  (+/-1°C) @ 1000°C The following picture shows the temp. distribution across the heating zone, please click to enlarge. 
               Temp. distribution profile    
Plasma RF Generator

  • Output Power:          5 -300W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:      200W max.
  • Matching:                 Automatic
  • RF Output Port:        50 Ω, N-type, female
  • Noise:                      <50 dB. 
  • Power:                     208-240VAC, 50/60Hz
  • Cooling:                 Air cooling. (water cooling is available upon request, and a water chiller can be ordered separately     Note: Water cooling is necessary for long time operation

Vacuum Flanges and Fittings
  • Vacuum flange set is made of stainless steel 304.
  • Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamps, a KF-25 right angle valve, a KF-25 vacuum bellows, a flange support, 3/8 O.D barbed fitting, and a needle valve.
  • Right flange assembly includes a digital Pirani gauge, 1/4 O.D tube fitting, 1/4" feedthrough, a needle valve and a KF-16 quick clamp set
Vacuum Pump 
  • 208 - 240V / 50-60 Hz (750W Max.)
  • 220 liters / M or 7.8 CFM
  • Oil Mist Eliminator is included
  • Max. vacuum:  3 X 10E-3 torr

Product Dimensions
  • Overall Dimensions: 1500mm x 600mm x 1200mm (all system, L x W x H)
  • Net weight: 350 lbs
  • Shipping weight: 480 lbs
Oxygen Monitoring (Optional)
An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
        









Optionals
                    
  • The OTF-1200X-50-PE-S-G package adds gas mixing & delivery capabilities onto the furnace system by integrating four Channel Gas Mixing Station with PLC Touch Panel Control and Precision Mass Flow Meters. Please select this model from Product Options above.
                             

Warranty 
  • One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass UL(UL61010), CSA or TUV certification on customer side at extra cost. ( please click marks below to learn details )
                  
Operation Instructions
             

Warning & Note


Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°CThe flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • MTI reserves right to modify PECVD design at  any time without notice but promise that quality will meet the specifications above

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.