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Home > Plasma Cleaners > Expanded Plasma Cleaner with Vacuum Pump , 6"Dx 6.5"L Chamber, 13.56 Mhz, 30W max. - EQ-PDC-001
Expanded Plasma Cleaner with Vacuum Pump , 6"Dx 6.5"L Chamber, 13.56 Mhz, 30W max. - EQ-PDC-001
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In stock
Item Number: EQ-PDC-001
Personalization
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EQ-PDC-001 is larger plasma cleaner with 6"dia x 6.5"L chamber. It is designed to clean and remove nano-scale organic contamination on substrate or wafer up to 4" using air, oxygen, or argon plasma. The rate of organic removal is about 20 nm/min Max. at high RF power. It is excellent tool to pre-clean single crystal substrate before epitaxial film deposition to achieve the better quality. If you don't have experience for plasma surface cleaning, please refer to the articles as the follows:
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McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. "Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon." Langmuir (2006) 22(13): 5617-5624.
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Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg, Reginald M. Penner, John C. Hemminger, Lisa M. Wingen, Theo Brauers, Barbara J. Finlayson-Pitts. "The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere." Phys. Chem. Chem. Phys. (2004) 6: 604-613.
- Mennicke, Ulrike, Tim Salditt. "Preparation of Solid-Supported Lipid Bilayers by Spin-Coating." Langmuir (2002) 18: 8172-8177.
Features:
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Includes a 6" diameter x 6.5" length Pyrex chamber and an integral switch for a vacuum pump
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Its hinged cover features a magnetic closure and a viewing window
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Adjustable RF power. Low, Medium, and High power settings
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Safe operation at low cost and environmental freindly
MAIN SPECIFICATIONS
| Input Power
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AC 110V , 50/60 Hz, < 200W
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| Output Frequency
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13.56 MHz
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| Plasma DC Power
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Output power is adjustable at three levels:
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Low Setting
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716V DC
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10 mA DC
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7.2 W
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Medium Setting
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720V DC
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15 mA DC
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10.5W
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High Setting
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740V DC
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40 mA DC
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30 W
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| Plasma Chamber
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| Vacuum Pump and Valve
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| Inert gas
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Many inert gases can be choosen for plasma cleaning, such as N2, Ar, Air and Mixed gas depended on what kind material will be treated . ( not included in the package)
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No flammable gas shall be used for the plasma cleaner
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| optional
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| Overall dimension
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11" H x 18" W x 9" D
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| Net Weight
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45 Lbs without pump
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65 Lbs with vacuum pump
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| Warranty
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One year limited ( no warranty for Pyrex glass chamber )
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| Operation Manual
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 Operation Manual click here to download
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Sale Price: USD$12,695.00
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Sale Price: USD$11,995.00
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MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
 ECS 221st, Booth#208, May 7-9, 2012, Seattle,WA, USA
 SVC TechCon2012, Booth# 739, May 1- 2, 2012, Santa Clara, California
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Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
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