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Home > Plasma Cleaners > Compact Plasma Cleaner with Vacuum Pump , 3"Dx 6.5"L Quartz Chamber, 13.56 Mhz - EQ-PDC-32G
Compact Plasma Cleaner with Vacuum Pump , 3"Dx 6.5"L Quartz Chamber, 13.56 Mhz - EQ-PDC-32G
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In stock
Item Number: EQ-PDC-32G
Personalization
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EQ-PDC-32G is compact and low cost plasma cleaner which is designed to clean and remove nanoscale organic contamination on wafer upto 2" using air, oxygen, or argon plasma. The rate of organic removal is about 10 nm/min Max. at high RF power. It is excellent tool to pre-clean single crystal substrate before expitxial film deposition to the acheive the better quality. If you don't have experince for plasma surface cleaning, please refer to the articles as the follows:
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McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. "Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon." Langmuir (2006) 22(13): 5617-5624.
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Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg, Reginald M. Penner, John C. Hemminger, Lisa M. Wingen, Theo Brauers, Barbara J. Finlayson-Pitts. "The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere." Phys. Chem. Chem. Phys. (2004) 6: 604-613.
- Mennicke, Ulrike, Tim Salditt. "Preparation of Solid-Supported Lipid Bilayers by Spin-Coating." Langmuir (2002) 18: 8172-8177.
Features:
- Compact, tabletop unit
- Adjustable RF power
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Low, Medium, and High power settings
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High purity 3" quartz chamber
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Safe operation at low cost and environmental freindly
Specifications
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Input Power
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Output Frequency
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13.56 MHz
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Plasma DC Power
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Output power is adjustable at three levels:
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Low Setting
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680V DC
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10 mA DC
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6.8W
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Medium Setting
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700V DC
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15 mA DC
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10.5W
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High Setting
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720V DC
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25 mA DC
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18W
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Plasma Chamber
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Vacuum Pump and Valve
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Inert gas
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Many inert gases can be choosen for plasma cleaning, such as N2, Ar, Air and Mixed gas depended on what kind material will be treated . ( not included in the package)
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No flammable gas shall be used for the plasma cleaner
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Overall dimension
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8.5" H x 10" W x 8" D
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Net Weight
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17 Lbs without pump
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37 Labs with vacuum pump
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Warranty
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One year limited ( no warranty for Pyrex glass chamber )
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Operation Manual
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Optional Accessories
Combinations of PDC-32G plasma cleaner with Two Channel Gas Mixer and
Digital Vacuum Gauge are possible. This will be a complete system
solution for introducing upto two (2) process gases and monitoring chamber pressure.
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Part Number
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Item Description
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Price
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Quick Link
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EQ-CVM-211
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Compact Digital Vacuum Gauge, Up to 10^-4 torr
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$465.00
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| EQ-CGM-2F
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Compact Two Channel Trace Gas Mixer (16 -160 ml/m)
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$815.00
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Sale Price: USD$12,695.00
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Sale Price: USD$11,995.00
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MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
 ECS 221st, Booth#208, May 7-9, 2012, Seattle,WA, USA
 SVC TechCon2012, Booth# 739, May 1- 2, 2012, Santa Clara, California
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Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
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