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UL Standard Compact RTP Furnace with 4" ID Quartz Tube & Digital Vacuum Gauge up to 1100ºC - OTF-1200X-RTP-4


Transported by LTL Freight (Truck)

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UL/CSA Certification:

Personalization

OTF-1200X-RTP-4 is a  compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube and vacuum flanges. It is designed for annealing semiconductor wafers or solar cells with diameters up to 3". OTF-1200X-4-RTP is heated by 8 units of 1KW halogen light with a max. the heating rate of 50ºC/second. 30 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible. This furnace also can be modified into an RTE, CSS or HPCVD  furnace ( see below application note )
SPECIFICATIONS
Furnace Structure
  • Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
  • High purity fibrous alumina insulation for maximum energy saving.
  • Split cover with Interlock protectioncut the power if lid open during furnace heating process.

Power Input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required)


Heating Elements

  • 8 pcs 1Kw Halogen light tube,  ( Dia. =10mm,  L=300mm, Heated Length =200mm)
  • Standard working life: 2000 hrs.  ( depends on heating rate )
  • The Halogen light tube is consumable.  Please click picture left to order spare one
        

Heating Zone

12" length with 4" constant temperature zone within +/-5ºC uniformity

Working Temperature

  • 1100ºC Max. for < 10 minutes
  • 1000ºC Max. for < 20 minutes   (Note: if running longer time, furnace case will > 100oC, must use fan cooling case from outside )
  • 800ºC Max.   for < 120 minutes
  • 600ºC Max.   for Continuous 

Max. Heating Rate

50ºC/sec

Cooling Rate

  • Max. Cooling: 60ºC/min (Under vacuum: 200 mtorr), 117ºC/min (under atmospheric pressure) 
  • Lowest Cooling:   10 ºC / minute

Thermocouple

K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath

Temperature Controller

  • FA-YD518P-AG temperature controller is included.
  • Proportional–integral–derivative control (PID control) and auto-tune function
  • 30 segments programmed with ramping, cooling and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • Default DB9 PC communication port
  • MET Certified

Temperature controller (optional)

  • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package  is available at the options bar. Click for the detail information about the MTS02-Y software kit. 
  • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller. 

Quartz Tube & Sample Holder

                     

Vacuum Flange

  • KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and water cooling jacket.
  • Only requires water cooling in long running times at temperatures > 600oC.
  • Circulating water rate: 0.5 m3 /hr.
  • The slide-out flange provides an easier way of loading, unloading the samples and other specific process needed.
  • Insert-able thermal-couple for accurate measurement.

Vacuum Pump  (optional)

  • EQ-FYP vacuum pump is recommended for this furnace. The ultimate vacuum pressure in this system can be 10^-3 torr. Vacuum bellows and clamps are included in this package. Click here for the spec of EQ-FYP vacuum pump. 
  • Click here to view other models of pump and package.

Water Cooling  (optional)

  • Cooling water is required.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.   
  • Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. 

Flow-meter

One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min

Vacuum Gauge

Digital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace.

Vacuum Pressure & Gas Fitting

  • Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter
  • Pressure can reach 10-4 torr by molecular pump with KF25 adapter

Dimensions

  •  Flange closed: 760mm(L) X 330mm(W) X 530mm(H) /Flange opened: 1200mm(L) X 330mm(W) X 530mm(H)

Net Weight

70 kg (150 lbs)

Warranty

One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).

Compliance

Please select the certificate in options bar:
CE Certificate & UL/CSA ready: CE approval, ready to pass UL/CSA certificate 
UL certircate -  UL apprval (UL 61010), at extra cost

       

Optional

 

 

  • You may combine the RTP furnace with high vacuum station or gas livery system as vacuum furnace or CVD system. Click pictures below to see details
  • For achieving fast cooling rate (< 10ºC/second), you may choose RTP furnace with sliding rail. Please click the picture below to see details.
  • You may order pressure control module ( click picture below-right ) to keep chamber at constant pressure
                

Application Notes

   

  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°CThe flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • This furnace also can be modified into an RTE, CSS or HPCVD  furnace with a graphite crucible coated with SiC ( click Pic-left for detail how to set up an RTE processing by DIY )
  • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.

Operation Instructions


            


STANDARD PACKAGE

Item No.

Description

Quantity

Quick Links

EQ-CVM-211

Digital Vacuum Gauge Up to 10-4 Torr

1

EQ-KF-Valve-D25

Vacuum Ball Valve with Dual KF-D25 port

1

RTP-ACC-01

Sample Holder for RTP furnace

1

AIN-Holder

Aluminum Nitride Substrate for RTP Furnace's Sample Holder

1

EQ-QZTube-RTP

Quartz Tube: 4.33" O.D x 4.05" I.D x 16.2" Length for RTP Tube Furnace

1

RTP-ACC-02

Quartz heat shield disk

4

EQ-WCT-12

20ft.polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI

1

EQ-SOR-110

Inner Rubber O-Ring 110 mm Diameter (4 pcs preinstalled)

8 in total

EQ-SOR-128

Outer Rubber O-Ring 128 mm Diameter (2 pcs preinstalled)

4 in total

EQ-RTP-Halogen-light

Halogen light

8

MTI-WATER-CONN

Water Hose Connector

2

EQ-KF-Clamp-D25

Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter

2

EQ-TC-K-Cali-12S-DT-LD

K-Type Thermocouple

1

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