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Dual Tube (100/80 mm) - CVD Sliding Furnace and 4 Channel Gas & Vacuum System - OTF-1200X-4-C4-SL-UL


Transported by LTL Freight (Truck)

Product Options

Heating zone:
Vacuum System:

Personalization

OTF-1200X-4-C4-SL is a special dual tube CVD system designed for coating thin film on the metal foil, especially for preparing flexible electrode on metallic foil on new generation energy research. Fast heating and cooling can be achieved by sliding the furnace. Please refer to the Operations Instructions section to see the operations of the furnace:
  • A dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside tube surface for CVD reaction. 
  • Vacuum sealed flanges for the dual tube, which allow reactive gasses to flow between two tubes ( 10mm space ) and inert gas flow inside the tube for cooling.
  • 4 gas channels controlled by 4 separate digital MFCs
  • Vacuum pump is included with KF25 adapter and pipe for plug and play
  • Sliding rail is installed on the bottom of single zone furnace, which allows for fast heating or cooling by sliding furnace from one side to the other side.
  • One slide stopping clamp is included for holding the position of the furnace.
Both heating zone and vacuum system are selectable: Single or dual heating zone; High-Speed Oilless Dry Vacuum Pump - VBS-M1 or Two Stage Mechanical Pump - VBS-ACP15.

SPECIFICATIONS:
Furnace Structure


Single heating zone
  • High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • Sliding flange assembly is made of stainless steel.
  • Dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside tube surface for CVD reaction
  • Heating zone length: 440mm
    Constant temperature heating zone length: 120 (±1°C) @400~1100°C
Dual heating zone
  • High purity Al2O3 insulation chamber ensures excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • Max. Temperature: 1200°C and continuous temperature: 1100°C.
  • Two Heating Zones controlled separately:
    Dual direction sliding rails to ensure furnace moves smoothly.
  • 200mm length for each heating zone, 400mm total heating length
  • 250mm constant temperature zone if the two zones heating at same temperature
  • 500oC max temperature difference if place a thermal block in between two zone
Power
Single heating zone
Power: 208-240VAC,  50/60Hz, single phase,  2.5KW ( 20A Breaker required)
Dual heating zone
Power:  208-240VAC,  50/60Hz, single phase,  4 KW ( 50A Breaker required) 
10 feet power cable with no plug (ask a licensed electrician to do the plug)
Heating Temperature
  • Max. Temperature: 1100°C
  • Continuous Temperature: 1000°C
Heating & Cooling Rate
Max. heating and cooling rates depend on working temperature.  Please click on tables below to see the Max. heating & cooling rate varies at different temperature range.
( You shall calibrate temperature and heating cooling rate at your working condition before use )
          click to enlarge  Heating plot        click to enlarge    Cooling plot
                                            
Fused Quartz Tubes
  • High purity quartz tube:
    Two pairs of vacuum sealed flanges with water cooling jackets and stainless steel needle valves
  • Outside tube EQ-QZTube-101D-1400: OD:4"x ID: 3.8" X 55" Length (OD 100 x ID 96 x 1400 mm )
  • Inside tube EQ-QZTube-80D-1800: OD:3.15: x ID x 2.95" x 70.8" Length (OD 80 x ID 75 x 1800 mm 

Vacuum Flanges
Using dual tube for inducing CVD growth on metal foil (wrapped around interior tube surface):

Please click  for a related article:  "Roll-to-roll production of 30-inch graphene films for transparent electrodes "

  • 1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and the space  between the outside tube and inside the tube (this space is considered as a reaction chamber).
  • 1-2. Leave both ends of inside tube open for gas cooling.
              Left flange (click to enlarge)  Right flange (click to enlarge)
Ultimate vacuum pressure:   10^-2 torr (by mechanical pump)
                                          10^-5 torr (by turbo molecular pump)

Temperature Controller
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in over temperature alarm and protection allows for operation without any attendant.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. 
    • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller. 
  •             

Mass Flow Meters & Gas Mixing Station


  • 4 precision mass flow controller ( MFC)  with digital display and adjusting knob are installed on the left bottom case to control gas flow rate:
  • 4 Gas channels (contact MTI sales if need more)
    • MFC 1: Control range from 0~100 SCCM
    • MFC 2: Control range from 0~200 SCCM
    • MFC 3: Control range from 0~200 SCCM
    • MFC 4: Control range from 0~500 SCCM
  • Flowing rate accuracy: ±1% FS
  • Gas inlet and outlet: 1/4" Swagelok tube connector
  • One 80mL gas mixing tank is installed in bottom case
  • Each gas channel has a stainless steel needle valve for easy on/off  
  • The flow rate is adjustable from the MFC panel
Vacuum Pump Station and valves

Optional 1:
             
Optional 2:
           
Water Cooling Function Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure the best-sealed chamber at high temperature:
  • Water cooling flanges require >= 10L/M water flow.
  • You may use tap water as the coolant, but we strongly suggest you to use a recirculating water chiller for environmental considerations. Please click thumb below to order the water chiller at extra cost.

         

Optional Parts (building up a single tube furnace) You can build up an 80mm Dia. single tube reaction chamber by ordering extra sealing flanges and install them onto interior tube:
                 (click to enlarge the picture)    click here to choose a crucible
Dimension
  • Furnace: 550 x 380 x 520mm
  • Bottom mobile case x 2: 600 x 600 x 600mm (one for gas mixing station and the other for vacuum pump)
Shipping
  • Shipping Weight: ~800 lb
  • Shipping by freight with three pallets
  • Crating fee will be applied
Warranty
One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below). 
Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details )
              
Application Notes

Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
  • One slide stopping clamp is included for holding the position of the furnace.
  • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.
Warning
  • Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gears such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!
Operation Instructions                   
                    

 (Operation and Installation Video)                  (Furnace-Sliding Test Demo)

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