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Home > What's new in MTI > Dual Tube CVD Furnace (100/80 mm) with Vacuum and 4 Channels Gas Delivery System & Sliding flange for Fast Heating and Cooling - OTF-1200X-4-C4LVS
Dual Tube CVD Furnace (100/80 mm) with Vacuum and 4 Channels Gas Delivery System & Sliding flange for Fast Heating and Cooling - OTF-1200X-4-C4LVS
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Click to enlarge
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Please email to info@mtixtl.com for lead time.
Item Number: OTF-1200X-4-C4LV-Slide
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OTF-1200X-4-C4LVS is a special dual tube CVD system designed for coating thin film on the metal foil, especially for preparing flexible electrode on metallic foil on new generation energy research. Fast heating and cooling can be achieved by sliding the furnace. Please click picture below to see principle of the furnace:
Features:
Dual quartz tube:100mm dia. outside tube and suspended by 80 mm diameter tube inside. metallic foil will be wrapped inside tube surface for CVD reaction
Vacuum sealed flanges for dual tube, which allow reactive gas go through between two tube ( 10mm space ) for reaction, and Inert gas go though center tube for cooling.
4 Channel gas controlled by 4 digital MFC
High speed mechanical vacuum pump is include with KF25 adapter and pipe
Sliding rail is installed on bottom of furnace, which allow fast heating or cooling by sliding furnace from outside to another side.
Specifications:
Furnace Structure
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High purity Al2O3 insulating chamber grantees the excellent temperature uniformity.
Cooling fans are installed at the bottom of the furnace to ensure hot flow normally discharging.
Sliding flange assembly are made of stainless steel.
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Power
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Power:208-240VAC, 50/60Hz, single phase, 2.5KW ( 20A Breaker required)
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| Heating Temperature
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Max. Temperature: 1100°C
Continuous Temperature: 1000°C
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Heating Zone
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Heating zone length: 440mm
Constant temperature heating zone length: 120 (±1°C) @400~1100°C
Optional:
you may choose dual zone furnace to get 240mm constant temperature zone at extra cost ( $2900 )
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Heating & Cooling Rate
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Max. heating and cooling rate depend on working temperature. Please click table below to see the Max. heating & cooling rate changed with temperature in air.
( You shall calibrate temperature and heating cooling rate at your working condition before use )
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Heating plot
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Cooling plot
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Fused Quartz Tube
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Outside tube: OD: 4"x ID: 3.8"X55" Length (OD100 x ID 96 x 1400, mm )
Inside tube: OD:3.15: x ID x 2.95" x 55" Length (OD80 x ID 75 x 1500 mm )
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Sliding Vacuum Flange
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One pair of flange made of SS304, which seals tightly between tubes by double high temperature O-rings to achieve high vacuum.
One pair of sliding rail is installed on bottom of furnace
Split furnace can be moved from one side to another manually to achieve fast heating or cooling.
Processing tube and flange , as well as sliding rail are fixed on bottom cart.
In order to achieve Max. heating rate, you can preheat the furnace first, then slide the heated furnace to sample end
In order to achieve Max. cooling rate, push furnace to another end , then forcing air cooling sample end
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| Left flange (click to enlarge)
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Right flange (click to enlarge)
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Ultimate vacuum pressure: 10^-2 torr (by mechanical pump)
10^-5 torr (by turbo molecular pump)
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Temperature Controller
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Temperature Controller: 30 segment programmable with PID tuning & Over temperature protection.
Temperature accuracy: +/-1°C
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Gas Mix Station
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Four precision mass flow controller ( MFC) with digital display are installed on the bottom case to control gas flow rate automatically.
- MFC 1: Control range from 0~100 sccm
- MFC 2: Control range from 0~200 sccm
- MFC 3: Control range from 0~200 sccm
- MFC 4: Control range from 0~500 sccm
Gas route: 4 routes
Flowing rate accuracy: 0.2% accuracy
Gas inlet and outlet: 1/4" swagelok tube connector
One gas mixing tank is installed on bottom case with liquid release valve.
Each gas route has a SS needle valve to on-off control independently.
The flow rate is adjustable in the MFC panel. Please see the pic below.
MFC panel structure (click to enlarge)
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Vacuum Pump
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Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed inside the vacuum station. vacuum pressure 10-2 Torr.
KFD25 adapter and stainless steel pipe are connected between pump and tube flange with a right-angle vacuum valve .
Digital vacuum pressure gauge and display are installed with the furnace.
Optional: you may choose molecular pump at extra cost to replace the mechanical pump to reach high vacuum pressure up to 10-5 Torr ( click to review molecular pump specs )
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25um Thickness Copper Foil
as Substrate (optional)
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Copper Foil for Graphene Growth (150m length x 150mm width x 25um thickness) - EQ-bccf-25u:
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Dimension
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Furnace: 550 x 380 x 520
Bottom Mobile case: 600x600x597
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Net Weight
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300 lb
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Warranty
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One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
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Certificate
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 CE certified
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Sale Price: USD$19,995.00
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Sale Price: Starting at USD$8,295.00
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Sale Price: USD$21,995.00
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Sale Price: Call for Price & Delivery
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MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
 ECS 221st, Booth#208, May 7-9, 2012, Seattle,WA, USA
 SVC TechCon2012, Booth# 739, May 1- 2, 2012, Santa Clara, California
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Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
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