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Dual Zone Quartz Tube Furnace (80mm Dia, 1200C Max) with 3-Ch Gas Mixer, Vacuum Pump, & Anti-Corrosive Vacuum Gauge - OTF-1200X-II-80-F3LV


In stock
Item Number: OTF-1200X-II-80-F3LV
Transported by LTL Freight (Truck)

OTF-1200X-II-80-F3LV is a CE certified and ready to pass UL/CSA certification spiltable dual zone Tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3  types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

SPECIFICATIONS 


Furnace Construction
  • Double layer steel casing with air cooling. 
  • Built-in thermostat automatically runs the cooling system when the case temp.  > 55°C.

Power Consumption

2.5 KW

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz 

Maximum Temperature 1200  °C
Continuous Working Temperature 1100  °C
Heating Zone Length Two Zones:  200 mm (8") for each zone and total 400 mm heating zone length


Constant Temperature Zone
  • If two zones are set at the same temperature, constant temperature zone is 10" (250 mm) long  with a temperature discrepancy of +/- 1°C.
  • If using only one zone (center zone), constant temperature zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1°C.
Max. Heating Rate <= 20  °C /min (20 °C /min below 800°C; <5 °C /min over 1000°C)
Temperature Accuracy +/- 1°C
Heating Elements Fe-Cr-Al Alloy doped by Mo









Temperature Controllers

  • Two precision temperature controllers to control two zones separately.
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by PC by installing two control modules. Please order the MTS-02 control modules at extra cost. 
    • The new version of PC module is now compatible with Lab View 05/08/2014
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
                  

Tube Size and Materials

Quartz Tube: 80 ODx 72 IDx 1000 L

Digital Vacuum Gauge 

Vacuum pressure gauges
                

Vacuum Sealing Flanges



  • Two stainless steel flanges with KF25 port, vacuum gauge and valves included.
  • Min. vacuum pressure achieved by mechanical pump is 5.5 m-torr. ( 5.5x10^-3 torr). The pressure can reach 10^-5 torr using mechanical + moleculer pumps.
  • Leaking rate is < 5 m-torr/min and stable vacuum pressure after 24 hours is < 2 torr.
  • Click the picture below to get details of both charts and data measured by CE cetified vacuum meter: 

    Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.

    Oxygen Monitoring

    An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
            

    Vacuum pump

    156 L/m Double Stage Rotary Vane Vacuum Pump with Exhaust Filter (220V single phase) and stainless steel hose tube are included for connecting to tube furnace. Max. archivable vacuum pressure is 10^-2 torr.


    Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.



    Gas Mixing Control Station

              1) Compact direct read flow meter, 10-100 cc/min.
              2) Compact direct read flow meter, 16-160 cc/min.
              3) Compact direct read flow meter, 25-250 cc/min.
    • Four pressure meters are installed inside the mobile cart which are able to monitor three types of flowing gas pressure as well as the pressure of mixing tank.
    Valves Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately


    Dimensions

    • Furnace: 550 x 380 x 520 mm 
    • Bottom Mobile case: 600 x 600 x 597 mm 

     Net Weight

    ~ 60 kg 

    Shipping Weight

    600 lbs

    Shipping Dimensions

    Three Pallets: 45"x45"x35" each

    Warranty

    One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

    Laptop, software & WiFi Control (Optional)

    • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
    • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
    • A wireless remote control provides up to 300 meters operating range.
    • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
    • Note: 
      The software is only compatible with MTI’s Yudian Temperature Controller

                




    Compliance

    • CE Certified
    • All electric components ( >24V) of the furnace are UL / MET / CSA certified, not including the gas mixing system, vacuum system and plasma generator
    • The furnace is ready to  pass TUV(UL61010) or CSA certification at extra cost.( please click marks below to learn details )

                        

    Application Notes

    Click here to learn the installation of a gas regulator

    Operation Instructions

            

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    Notices
    1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor cost.
    3. The prices listed are subject to change without notice.