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2 Channel ALD Control Unit with 4 Channel MFC Gas Delivery System - EQ-ALD-GSL-4

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Item Number: EQ-ALD-GSL-4

    EQ-ALD-GSL-4 is a two channels precision ALD precursor delivery unit with four channels MFC gas mixing and delievry system , which is designed for DIY a ALD coating system with any furnace or chamber for thin film growth and powder surface coating. The LCD touch screen provides easy control for ALD puls time and gas flow for each channel.   


Working Voltage

    AC 220V Single phase 50/60Hz


    100 W

PLC Touch Screen  

  • All parameters of ALD vapor puls time, and  Gas flow are controlled by PLC via a 6" touch screen panel in a mobile cart 
    • Control Two ALD valves with pulse duation time and cycling with mico-second precision
    • Control For channels gas delivery with ±0.2%F.S via MFC
    • Display vacuum pressure 
    • Other parameter upon request of customer
    • Please click picture left to see control interface
  •  RS485 Port and a supplied software are included for remote operation by PC.

 ALD Valves

  • Two ALD vlaves are required to deliver two type of  vaper precusors ( not included )
  • You may use your own ALD valve or click picture below to order from us

Mass Flow Controller

  •  Four MFC is included to delive 4 types of carrying gases independently or mixing 
    • Controlling Range:
    • Controller 1: 0~100 SCCM
    • Controller 2: 1~199 SCCM
    • Controller 3: 1~199 SCCM
    • Controller 4: 1~499 SCCM
    • Note:Other range MFC can be customized at extra cost upon request. ]
  • Working Temperature: 5~45 ºC
  • Max. Pressure: 3x10Pa
  • Accuracy: ±1.5% FS
  • Liner: ±(0.5-1.5)%F.S.
  • Duplicate accuracy: ±0.2%F.S.
    Gas Pipeline
  • One stainless steel gas mixing tank is built in
  • Internal pipeline: 1/4" O.D stainless steel
  • External pipeline: 1/4" O.D PTFE
  Gas Mixing Tank     Φ80X120mm

    Stop Valve & Fittings
  • 4 needle valave made of  316 Stainless Steel are included
  • Φ1/4” Swagelok Tube Fitting
  Dimensions     600mm(L) x 745mm(W) x 700mm(H)
  • All components are CE certified 
  • The unit can pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details )
    One year limited with lifetime support
  • You may consider to order bubbler or vapor delivery system by click picture below
  • We can help you to connect the ALD control unit with MTI tube furnace at extra cost

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2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.