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Anti-Corrosion Three Channel Gas Mixing Control Station Made of PTFE Parts - EQ-GSL-3F-PTFE

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Item Number: EQ-GSL-3F-PTFE

EQ-GSL-3F-PTFE is a three channel anti-corrosion gas mixing & delivery system. All parts coming in contact with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter).  It is designed for delivering corrosive gases,such as hydrogen sulfide (H2S) and  hydrogen selenide ( H2Se) for CVD processing.


Floating meter

Three anti-corrosive Floating Flow-meter made of  PTFE material with s flowing rates of 10 - 1000 mL/min.


 Three needle valves made of PTFE material which controls gas out-let on front panel

Gas Mixing Tank
  •  1000 mL  gas tank made of PTFE
  •  Each channel gas will flow into the tank for mixing before flow-out

Pipe fitting
  • Pipe fitting made of PTFE and accept  1/4" pipe (nylon or stainless steel)

  • Three Gas Inlet fittings (from gas tanks) are Installed in right side of cart
  • Two channel gases flow into a gas mixer container and one gas channel independent (please review manual for drawing)
  • Two gas outlet fittings (to tube furnace) are installed in left side of cart (one for mixing gas and one independent)
  • 12' length 1/4" PTFE pipe is included for immediate use

Mobile Station
  • Heavy duty Mobile Cart with four wheels and brake, where MTI small furnace can be put on the top

  • Size 600 mm (L) x 600 mm  (W) x 650 mm ( H)
  • Net Weight: 160 Lb
  • Max. loading weight:  500 Lb

  • Shipping dimension: 41 x 49 x 38 inch
  • Shipping weight: 200 lbs


  •   Two years limited with life time support
Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:

Application Notes
  • If your CVD processing involves corrosive gas, such as H2S, please consider to use PTFE flange on your tube furnace
  • Also, please choose anti-corrosion dry vacuum pump instead of oil vacuum pump
Operation Instruction  Operation Manual

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