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Compact High Resolution Film Thickness Monitor, Controller, and Rack - EQ-TM106


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Item Number: EQ-TM106

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The single channel Compact High-Resolution Thickness Monitor /  Controller are based on the principle that the oscillating frequency of a quartz crystal is changed by the mass of a deposited film on its upper face. Electronically measuring this effect allows for a determination of the thickness of a deposited film. Once the density of the evaporated material is entered into the system, the thickness is measured to a resolution of 0.1 Å on a  digit LED display having a range of 0-999.9 nanometers. The crystal and holder are mounted in the vacuum chamber and connected to  control box .

SPECIFICATIONS:
Input Power AC 110V  or 220V,  50/60 Hz, < 200W
Crystal Frequency 6 MHz with resolution of 0.03Hz
Thickness Rang 0.0 - 999.9nm
Film Thickness Resolution 0.10 Å  
Film Growth Rate  Resolution 0.1Å/S
Measurement Speed
1 - 10 time / S

Front Panel
       &
Back View
              
Quartz Crystal Oscillator 10 pcs new gold oscillators crystal ( 14mm diameter )  included

Crystal Probe Holder
  • Probe length: 120 mm standard ( 30 - 1000 mm customized length available upon request )
  • Probe diameter: 10 mm with water cool
  • Vacuum connecting:   CF25
  • Built in water cold jacket to keep probe temperature lower than 150oC
Control & Display
  • Control box : connect to Oscillator box
    • 6 digital LED display with  zero button
    • allow to set up thickness termination program to shutdown coater power
  • Oscillator box:  
    • connect to the control box
    • oscillator box dimension: 96 x 45 x 18mm
    • Also, can directly connect to PC via USB connector to monitor the thickness
                         
    Warranty One year limited warranty with lifetime support 



   Application Notes 
  • Choosing the right crystal. Three electrode material: Glod, Silver, Alloy.
  • Recommend gold crystals for most applications. 
  • And alloy crystals are recommended for optical coating with dielectric materials and for semiconductor processes with high-stress materials.
  • It may be worth testing the two types of crystals when commencing new thin film processes.

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.