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Compact High Resolution Film Thickness Monitor, Controller, and Rack - EQ-TM106

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Item Number: EQ-TM106


The single channel Compact High-Resolution Thickness Monitor /  Controller are based on the principle that the oscillating frequency of a quartz crystal is changed by the mass of a deposited film on its upper face. Electronically measuring this effect allows for a determination of the thickness of a deposited film. Once the density of the evaporated material is entered into the system, the thickness is measured to a resolution of 0.1 Å on a  digit LED display having a range of 0-999.9 nanometers. The crystal and holder are mounted in the vacuum chamber and connected to  control box .

Input Power AC 110V  or 220V,  50/60 Hz, < 200W
Crystal Frequency 6 MHz with resolution of 0.03Hz
Thickness Rang 0.0 - 999.9nm
Film Thickness Resolution 0.10 Å  
Film Growth Rate  Resolution 0.1Å/S
Measurement Speed
1 - 10 time / S

Front Panel
Back View
Quartz Crystal Oscillator 10 pcs new gold oscillators crystal ( 14mm diameter )  included

Crystal Probe Holder
  • Probe length: 120 mm standard ( 30 - 1000 mm customized length available upon request )
  • Probe diameter: 10 mm with water cool
  • Vacuum connecting:   CF25
  • Built in water cold jacket to keep probe temperature lower than 150oC
Control & Display
  • Control box : connect to Oscillator box
    • 6 digital LED display with  zero button
    • allow to set up thickness termination program to shutdown coater power
  • Oscillator box:  
    • connect to the control box
    • oscillator box dimension: 96 x 45 x 18mm
    • Also, can directly connect to PC via USB connector to monitor the thickness
    Warranty One year limited warranty with lifetime support 

   Application Notes 
  • Choosing the right crystal. Three electrode material: Glod, Silver, Alloy.
  • Recommend gold crystals for most applications. 
  • And alloy crystals are recommended for optical coating with dielectric materials and for semiconductor processes with high-stress materials.
  • It may be worth testing the two types of crystals when commencing new thin film processes.

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