Browse Categories

Fluidized Bed CVD(FBCVD)Furnace with 1'' O.D Quartz Tube and Flange for Powder CVD - OTF-1200X-S-FB

In stock
Item Number: OTF-1200X-S-FB
Transported by LTL Freight (Truck)


Upgrade to Eurotherm Temperature controller
OTF-1200X-S-FB is a UL/CSA ready to pass and  a Fluidized Bed Vertical Furnace with 1'' O.D Quartz Tube (2'' O.D enlarged central area) for powder CVD ( FBCVD)applications. It consists a vertical positioned cylindrical heating chamber which surrounds the quartz tube with a built-in filter right in the lower middle section of the central heating zone. Its filter is a porous (15~40 microns) quartz frit that allows the controlled gas flow pass through and  float the particles on a cushion of the gas stream where the interaction between the solid and gaseous materials take place.
Fluidized Zone

  • Provides uniform distribution of the gas blast over the entire cross section of the tube chamber
  • Solid particles are suspended by an upward gas flowing
  • Excellent heat transfer and coating to every single suspended particle 
  • Processed materials can be discharged from the top side of the tube after the cap is been taken off

Note: The gas is passed upward through the fluidized bed at a high enough velocity to lift the particles. However, particles may be swept away from the tube chamber entirely if the velocity was set too high. Depends on the particle size, you may want to adjust the gas in pressure and flow rate until particles are lifted and move turbulently inside of the tube.

Quartz Frit

Frits with forced convection design can trap the particles within the central heating area
  • Frit: 15~40 microns porous, 22mm O.D x 4mm thick
Furnace Casing
  • Double layer steel structure with air cooling
  • Split door design for easy installation of tube
  • High purity Al2O3 fibrous insulation designed for maximum energy saving




AC 110V or 220V Single Phase, 50/60 Hz

Max. Temperature


Continuous Temperature


Max. Heating Rate

<= 20 oC /min

Tube Size and Materials

  • One quartz tube is included. Main tube with bottom frit and enlarged space for particles processing
  • Two Ends: 25mm O.D, 22mm I.D; Central: 50mm O.D, 44mm I.D, for detailed size, please refer to the picture in below.
  • Central enlarged area ensures the high aerodynamic performance

Sealing Flanges

  • Bottom flange: Regular designed 1'' bottom flange with 1/4'' tube fitting for introducing primary gas 
  • Top Flange: Special designed 1'' top flange with backstreaming secondary (precursor) gas inlet and exhaust, please click the picture in below for detail


  • Das delivery may be needed for gas control
  • Oxygen Monitoring: An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
  • Ultrasonic Atomizer can be integrated to the system for delivering sub-micron droplets  to hot zone where the interaction between powder and liquid take place. Please cick bottom right picture for details.

Heating Zone Length

200mm  (single zone)

Constant Heating Zone 100mm (+/-2oC)

Temperature Controller

  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
Heating Elements
Fe-Cr-Al Alloy doped by Mo
Fitting Ports
1/4'' Tube Fittings were installed on both sides of the flange for standard connection to the gas supplier


340mm×300mm×1000mm ( W x L x H)

Net Weight

~20 Kg (excluding mobile cart)

Shipping Weight

200 lbs


One year limited warranty (Consumable parts such as heating elements, processing tubes and o-rings are not covered by the warranty, please order the replacement at related products below.)

Laptop, software & WiFi Control (Optional)

  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller


  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • NRTL or CSA certification is available at extra cost. ( please click marks below to learn details )


Click here to learn the installation of a gas regulator

  • Tube furnaces with quartz tube is designed for using under low positive pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 

Operation Instructions


Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop

MTI-UCSD Battery Fabrication Lab

MTI Sponsors the Postdoctoral Awards

Upcoming Shows:
MS&T 2018 Oct 14-18 Columbus OH Booth 513

2018 MRS Fall Meeting and Exhibit Nov 25 - 30 Boston MA Booth 901

APS March Meeting 2019 March 4-8 Boston MA

Recent Attended Shows:
Furnaces North America Oct 8-10 Indianapolis IN

AiMES 2018 Sept 30 - Oct 4 Cancun Mexico

Zhejiang University MSE Visiting August 10th Richmond CA

Click here to see our past conferences


1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.