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2-9 Channel Gas Optional Control System with PLC Touch Panel and PC Operation Software - EQ-GSL-LCD


Product Options

Number of Channels:

    EQ-GSL-LCD gas mixing station is designed for the control of 1-9 types of gasses flowing through vacuum-sealed tube furnaces at a low cost. It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top.  LCD touch screen is integrated to provide easy control of the gas flow rate of each independent channel. Such a system is suitable for using with CVD furnaces to study the gas environmental influence on various materials.


SPECIFICATIONS

Function

Two Channels

Three Channels

Four Channels

Customised Four to Nine Channels


Computerized 
Mass Flow Controller


Note:Other range
 MFC can be 
customized at extra cost upon request. 



 
Working Temp. : 5~45 ºC  
Max. Pressure: 3x10Pa  
Accuracy: ±1.5% FS  
Liner: ±(0.5-1.5)%F.S.
Duplicate accuracy: ±0.2%F.S.
Controlling Range:
  • Controller 1: 1~199 SCCM
  • Controller 2: 1~499 SCCM

Working Temp.: 5~45 ºC
Max. Pressure: 3x10Pa
Accuracy: ±1.5% FS
Liner: ±(0.5-1.5)%F.S.
Duplicate accuracy: ±0.2%F.S.
Controlling Range:
  • Controller 1: 0~100 SCCM
  • Controller 2: 1~199 SCCM 
  • Controller 3: 1~499 SCCM 

Working Temp.: 5~45 ºC
Max. Pressure: 3x10Pa
Accuracy: ±1.5% FS
Liner: ±(0.5-1.5)%F.S.
Duplicate accuracy: ±0.2%F.S.
Controlling Range:
  • Controller 1: 0~100 SCCM
  • Controller 2: 1~199 SCCM
  • Controller 3: 1~199 SCCM
  • Controller 4: 1~499 SCCM
Working Temp.: 5~45 ºC
Max. Pressure: 3x10Pa
Accuracy: ±1.5% FS
Liner: ±(0.5-1.5)%F.S.
Duplicate accuracy: ±0.2%F.S.
Select Range from below to make Customised Four to Nine Channels:
  • 0~100 SCCM
  • 1~200 SCCM
  • 1~500 SCCM
  • 1~1000 SCCM
  • 1~2000 SCCM
  • 1~5000 SCCM

Working Voltage

    AC 220V Single phase 50/60Hz

Power

    23W


PLC Touch Screen  

  • 6" color touch screen control panel to make parameter setting at easy.
  • Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now. 
Mechanical Pressure Gauge     Measurement Range:-0.1~0.15 MPa (0.01 MPa/grid)
Needle Valve     316 Stainless Steel
Gas Pipeline
  • One stainless steel gas mixing tank is built in
  • Internal pipeline: 1/4" O.D stainless steel
  • External pipeline: 1/4" O.D PTFE
Gas Mixing Tank     Φ80X120mm

Stop Valve & Fittings
    316 stainless steel needle valve, 
    Φ1/4” Swagelok Tube Fitting
Dimensions     600mm(L) x 745mm(W) x 700mm(H)
Compliance
  • All components are CE certified 
  • The unit can pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details )
           
Warranty
    One year limited with lifetime support
        
Oxygen Monitoring

  • An Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
Application Note
  • Waiting for 15 minutes to warm up the gas mixer and start your gas supply to charge.
Related Products
        CVD & PECVD Furnace                              Click picture below to order bubbler or evaporator for CVD               
                                

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.