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Ultra-High Vacuum Thermal Evaporation Coater With Four Heating Sources (10-6 torr) - GSL-1800X-ZF4


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Item Number: GSL-1800X-ZF4
Transported by LTL Freight (Truck)

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GSL-1800X-ZF4 is a ultra-vacuum evaporation coater designed for coating oxygen sensitive metallic materials, such as Ti, Al, and Ir etc. It also can be used for coating all kinds of materials.  It has four evaporation heater sources and coat two type of materials at the same time at high vacuum up to 10-6 torr.  It is an excellent and cost-effective coating machine for research labs.

SPECIFICATIONS 

Input & Output Power

  • Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase  
  • Total Power required:  8KW ( including pump)
  • other 3 phase voltage is available upon request
  • Output:  5VAC max.  and 300A Max.

Vacuum Chamber

  • Stainless steel chamber:  280mm ID. x 375 mm Height, ( ~23 Liter) Sand-blasting electrolytic polishing surface  
  • 100 mm observation window  in front of chamber
  • Hinged type door for easy sample loading
  • Manually operated shutters are on top of each evaporation W boat, which allow evaporating 4 kinds of material one by one
  • 4 KF40 ports built in chamber for connecting to necessary device
Vacuum Pump 


  • High-speed turbo vacuum pump is included and connected to the vacuum chamber. ( pls click picture left above )
    • Vacuum speed:  600L/S
    • Vacuum level: 5.0x10-6  Torr ( after 40 minutes pumping )
    • Limit vacuum:   5.0x10-7  Torr  ( after baking at 100 -150°C)
    • Leaking rate:    5.0x10-7 Pa.
    • Vacuum port:  150 mm diameter

Evaporation Source
&
Sample Holder

  • Four tungsten heating boats are included  supported by water cold electrodes
  • Tungsten heating boat has dimension 70mm L x 12 mm W x 3 mm H。 Spare W boat is available at extra cost。
  • Each top of boat has a manual operation shutter 
  • Built in manual shutter allows evaporation source can be used without contamination
  • 100 mm diameter rotating sample holder is on top of the chamber with diameter 260mm, which can be heated up to 600°C max. via digital temperature controller with +/1 °C accuracy
  • The distance between evaporation source and sample holder is 150-300 mm adjustable
                           
Thickness control (optional)
  • One High-Resolution Film Thickness Monitor and Controller is optional (click picture below to see detail specs )
  • The accuracy of thickness control is 1.0A
              
Control Unit
  • Vacuum, thickness and power control are integrated into one control box
  • Control Unit is separated from vacuum chamber for easy moving
  • You may place the control unit on the top of vacuum station 

Overall Dimensions

L600mm× W860mm× H1500mm

Net Weight

600 kg


Operation Instructions

       
          

Facility Requirement  for Installation

  • Space:  250 SF with height > 6 feet
  • Power:  208 - 240V AC, single phase with Max 10KW ( 50A breaker)
  • Water:   > 15L/minute flowing water required for electrode cooling.  You may order recirculating water chiller to save water by click picture below at extra cost.
              
Application Notes


Warranty & Certificate

  • Two years limited warranty with lifetime support
  • CE certified

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.