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4" High Vacuum Magnetron Sputter Source with Quick Connector - HVMSS-SPC-4LD


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Item Number: HVMSS-SPC-4LD

Personalization

The HVMSS-SPC-4 is a 4" diam. circular magnetron sputtering gun which can accommodate a wide range of sputtering targets, such as metallic/insulating or magnetic/non-magnetic. The circular rare-earth NdFeB permanent magnet is implemented to ensure excellent film uniformity and target utilization. Such a sputtering gun is easy to operate and maintain. Installation is straight forward and it can be operated with either DC or RF power supply.

SPECIFICATIONS:

Features
  • Made of high-quality materials of stainless steel and ceramics. 
  • Electromagnetic finite element calculations are used in the design of the permanent magnetic assembly to achieve high field strength and uniform field profile. 
  • The magnet is coated with protective material against cooling water corrosion to maximize durability.
  • Standard RF connector, which matches with a wide range of DC and RF sputtering power supplies.
  • The low impedance sputtering heads are easily interfaceable with an external power supply.
  • Easy to install a standard fitting with included quick connector
  • Target replacement is easy and  no need to adjust the gun to fit targets with different height.
Power Requirement
  • DC (Max.) 2000 W
  • RF (Max.)  1000 W
Electrical Connection Type


  • Standard HN Female Connector is included (DC and RF, Picture below left )
  • Optional SL16 cable Connector   ( Picture below right)
  • 148 cm RF cable is recommended with extra cost (click Pic. right 1 to order)
                        
Sputtering Current (Max.) 3 Amp
Sputtering Voltage 100-1000 V
Sputtering Pressure 3 - 50 mTorr
Operating Temperature  10 - 100oC


Sputtering Uniformity Curve
          
Dimensions
  • Total Length: 14"
                


Sputtering Target
  • Diameter:                         4.0" 
  • Thickness:                       up to 1/8" for non-magnetic target; up  to 1/16" for magnetic target
  • Utilization:                        up to 30%
  • Magnet:                            NdFeB Rare Earth Magnet

Cooling Water Requirement
  • Flow Rate:                         0.8 GPM
  • Water Inlet Temperature:     <20 C
  • Water tubing:                     0.25" O.D.
Mounting
  • Feedthrough:                      3/4" O.D.tube
Net Weight 3.5 lbs




Accessories
  • High vacuum Quick connector with 0.75" ID is included. Use this component to install the sputtering source onto the baseplate (up to 1” thick) of a vacuum chamber with  1” diameter through-hole at easy (click pic below left to see detail )
  • Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available at extra cost, please click picture below right to order.
                              
Operation Instructions
             
Warranty One year limited with lifetime support

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.