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Compact Liquid Heating or Vaporization Systems for CVD -- LVD-F1

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Item Number: LVD-F1
LVD-F1 is a compact, precision & cost effective liquid heating or evaporating delivery system for lab scale CVD furnace.  Different with a conventional bubbler,   LVD-F1 's Liquid flow and vapor flow are controlled precisely by a digital liquid pump up to 10ml/ minute with +/- 0.005 ml accuracy.  Liquid goes through a heater by controlling the inert gas and becomes vapor instantly to CVD processing into a tube furnace.  LQD-F1 can deliver many organic compounds and all types of liquids, such as ETOH, SnCl4, TiCl4r, SiHCl3, and Zn(C2H5)2 etc., without worrying about corrosion.  It is an ideal tool for CVD processing of nano wire and film in material research.
Product Structure                
Power Input         
  • 220V 50Hz
  • 2200 W Power consumption
  • 110V is available with a transformer

    Liquid Flow Control
    • Precision digital control with +/- 0.5% FS accuracy
    • Flow rate arrange : 0 - 10 ml/minute adjustable  ( min. rate: 0.1 ml/min )
    • The liquid can be soaked from a container ( not included ) automatically.
    Heater  & Temperature controller                   
    • Liquid and carrying gas go through an SS316 coil, which is heated by a built in small furnace up to 550ºC
    • One heating tube is included to prevent output vapor from condensing on tube or flange ( max. temperature 200ºC). The heating tube could be generate as secondary heating to prevent the liquid or gas cooldown while passing through the tube.
      Gas flow control
      • Carrying gas (inert gas) is controlled by a precision float flow-meter (200 - 2000 mL/min adjustable). The optional digital mass flow controller is available at extra cost.
      • Pressure gauge built in front panel
      • Two SS needle valves are installed to control gas in and out
      • Vapor Gas outlet tube size:  1/4"OD  SS316
      • Note: 1/4'' PTFE tube, 1/4'' SS tube and beaker are not included, customers need to prepare them according to your own experimental needs.
      Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
      Application Note
      • This system can fit with all MTI tube furnace and CVD furnace, click picture below to see how, and choose a furnace at " CVD Furnace System" 
      Dimension & Weight
      • Heater & Gas Control Unit:   390L  x 420W" x  360H, mm
      • Net weight:  5 Kg
        One year limited and extended warranty available upon request

      Operation Instructions

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