Browse Categories

N2 equivalent Mass Flow Controller upto 5000sccm (NO display, Product for Replacement or Repair only) - EQ-MFC-7B

Sale Price: For Replacement or Repair Parts Only
If you are international, please click this.

Product Options

Controlling Range:
EQ-MFC-7B is a cost effective MFC for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes.
  • MFC are standard calibrated by N2 while it is out of factory, other gas calibration can be approximated by converting of conversion factors of our instruction,
  • Other gas calibration MFC can be ordered upon request, please email us for the price, the lead time is 8 -10weeks after PO.
  • Mass Flow Controller for the use in MTI Multiple Channel Gas Control Systems only
  • Ideal for vacuum coating and other gas mixture applications.
  • International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting
  • Note: This MFC is for replacement of MTI gas mixing and delivery system at related product below.  In order to operate it independently, you need order EQ-MFC-COM


Full scale range (N2)

( 0~100,200, 500, 1000, 2000, 5000)SCCM

Other range can be customized at extra cost, please email to


±1.5% F.S.


±0.2% FS


±1% FS

Response Time


Valve Configuration

Normally Closed

Operation Temperature


Input Signal (0~5) VDC
Output Signal (0~5) VDC

Power Supply

+15V 50mA; -15V 200mA

Electronic Connector

 D sub 15 pins male

Differential Pressure

(0.1~0.5) Mpa

Max Pressure


Leak integrity

1×10-8 atm·cc / sec He

Seals Materials

Viton; Neoprene





Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsors MTI-UCSD Battery Fabrication Lab:
MTI-UCSD Battery Fabrication Lab Opening

MTI sponsors MRS and ECS Postdoctoral Award:

MTI Sponsors the Postdoctoral Awards

Upcoming Shows:
BPS 2018 62nd Annual Meeting Biophysical Society Feb 17-21 San Francisco CA Booth 909

2018 SME Annual Conference & Expo Feb 25 - 28 Minneapolis, MN Booth 701

Recent Attended Shows:
2017 MRS Fall Meeting and Exhibit Nov 26 - Dec 1 Boston, MA

2017 MMM Conference Nov 6-10 Pittsburgh, PA

Zhejiang University MSE Visiting Oct 31 Richmond CA

Click here to see our past conferences


1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.