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N2 equivalent Mass Flow Controller upto 5000sccm (NO display, Product for Replacement or Repair only) - EQ-MFC-7B


Sale Price: For Replacement or Repair Parts Only
If you are international, please click this.

Product Options

Controlling Range:
EQ-MFC-7B is a cost effective MFC for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes.
  • MFC are standard calibrated by N2 while it is out of factory, other gas calibration can be approximated by converting of conversion factors of our instruction,
  • Other gas calibration MFC can be ordered upon request, please email us for the price, the lead time is 8 -10weeks after PO.
  • Mass Flow Controller for the use in MTI Multiple Channel Gas Control Systems only
  • Ideal for vacuum coating and other gas mixture applications.
  • International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting
  • Note: This MFC is for replacement of MTI gas mixing and delivery system at related product below.  In order to operate it independently, you need order EQ-MFC-COM

Specification

Full scale range (N2)

( 0~100,200, 500, 1000, 2000, 5000)SCCM

Other range can be customized at extra cost, please email to info@mtixtl.com

Accuracy

±1.5% F.S.

Repeatability

±0.2% FS

Linearity

±1% FS

Response Time

≤10sec

Valve Configuration

Normally Closed

Operation Temperature

(5~45)℃

Input Signal (0~5) VDC
Output Signal (0~5) VDC

Power Supply

+15V 50mA; -15V 200mA

Electronic Connector

 D sub 15 pins male

Differential Pressure

(0.1~0.5) Mpa

Max Pressure

3MPa

Leak integrity

1×10-8 atm·cc / sec He

Seals Materials

Viton; Neoprene

Fittings

Swagelok1/4”

Weight

1.1kg


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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.