Browse Categories
Search

Mini CVD Tube Furnace with 2 Channel Gas Mixer, Vacuum Pump, and Vacuum Gauge - OTF-1200X-S50-2F


In stock
Item Number: OTF-1200X-S50-2F
Transported by LTL Freight (Truck)

OTF-1200X-S50-2F Mini CVD tube furnace is a CE Certified split tube furnace for heating samples up to 1200°C. A KF25 Gas Outlet and a Digital Vacuum Gauge are installed in the right flange for connection with a 226L/m Mechanical Pump (with Pump Filter). The left flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe. The precision temperature controller will provide 30 segments heating and cooling steps with +/- 1 °C accuracy. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases. In addition, you can get an accurate pressure reading with any mixed gases via the Digital Vacuum gauge.

SPECIFICATIONS
Furnace Structure
Heavy duty steel casing
Energy efficient Al2O3 fibrous thermal insulation

Power Consumption 1.75KW
Input Voltage AC110V (For using under AC 220V, please contact our tech. support team)
Temperature 1200 Max. for < 1hr
1100 for continuously heating
Heating rate <= 10C/min
Processing Tube
Quartz tube  50 x 43 x 600mm (O.D x I.D x Length)
Heating Zone
Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C.
The following picture left shows the temp. distribution across the heating zone, please click to enlarge.
Two thermal blocks are included and must be placed inside tube as shown picture below-right
               click here to choose a crucible
Temperature Controller
  • PID automatic control and auto-tune function.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
                   
Heating Elements Fe-Cr-Al Alloy doped by Mo
Digital Vacuum Gauge
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
  • Gauge is installed on the vacuum flange (left side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
  • Accurate pressure reading with any mixed gases
Two Channel Gas Mixing Station
  • Two floating flow meters 16 to 100 mL/min flow rate range
  • Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)
  • Vacuum needle valves are made of SS304
  • Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel
  • Compact size:  340Lx300Dx 180H mm ( 13.4"x12"x7")
  • Net Weight: 14 lbs
  • No power required
  • Click the pictures below to see more details

                      ( optional   click  the pic to order Constant temperature control module )

Oxygen Monitoring (Optional)
An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
        
Vacuum Flanges and Fittings
Structure (click on pictures to enlarge)
            Left side        Right side                       

Vacuum fittings in standard package:
Vacuum Pump and Vacuum Level
  • Double Stage Rotary Vane Vacuum Pump EQ-FYP-Pump (156L/m) with oil trap, Exhaust Filter, Bellow& KF-D25 Inlet and KF25 Clamp are included.
  • Vacuum Pressure can reach 1E-2 Torr ( 50 m-torr) 
Net Weight 100 lbs
Product Dimensions
  • Furnace: 340 x 300 x 400 mm
  • Vacuum Pump: 440 x 160 x 300 mm
  • Gas Station: 340 x 300 x 180 mm
Shipping Weight 200lbs
Shipping Dimensions 45x45x35"
Warranty
One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). 
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller

        

Compliance
  • Furnace:
    • CE/UL/CSA Certificate
    • Please select the certificate in options bar:
      • CE Certificate & UL/CSA ready to pass UL/CSA certificate at extra cost
      • UL certificate -  UL apprval (UL 61010)
                      
  • Vacuum Pump:    CE Certified
Application Notes

Click here to learn the installation of a gas regulator
Operation Instructions                   

Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop

MTI-UCSD Battery Fabrication Lab


MTI Sponsors the Postdoctoral Awards

Upcoming Shows:
MS&T 2018 Oct 14-18 Columbus OH Booth 513

2018 MRS Fall Meeting and Exhibit Nov 25 - 30 Boston MA Booth 901

APS March Meeting 2019 March 4-8 Boston MA

Recent Attended Shows:
Furnaces North America Oct 8-10 Indianapolis IN

AiMES 2018 Sept 30 - Oct 4 Cancun Mexico


Zhejiang University MSE Visiting August 10th Richmond CA


Click here to see our past conferences

 

Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.