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Mini CVD Tube Furnace with 2 Channel Gas Mixer, Vacuum Pump, and Vacuum Gauge - OTF-1200X-S50-2F

In stock
Item Number: OTF-1200X-S50-2F
Transported by LTL Freight (Truck)

OTF-1200X-S50-2F Mini CVD tube furnace is a CE Certified split tube furnace for heating samples up to 1200°C. A KF25 Gas Outlet and a Digital Vacuum Gauge are installed in the right flange for connection with a 226L/m Mechanical Pump (with Pump Filter). The left flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe. The precision temperature controller will provide 30 segments heating and cooling steps with +/- 1 °C accuracy. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases. In addition, you can get an accurate pressure reading with any mixed gases via the Digital Vacuum gauge.

Furnace Structure
Heavy duty steel casing
Energy efficient Al2O3 fibrous thermal insulation

Power Consumption 1.75KW
Input Voltage AC110V (For using under AC 220V, please contact our tech. support team)
Temperature 1200 Max. for < 1hr
1100 for continuously heating
Heating rate <= 10C/min
Processing Tube
Quartz tube  50 x 43 x 450mm (O.D x I.D x Length)
Heating Zone
Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C.
The following picture left shows the temp. distribution across the heating zone, please click to enlarge.
Two thermal blocks are included and must be placed inside tube as shown picture below-right
               click here to choose a crucible
Temperature Controller
  • PID automatic control and auto-tune function.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
Heating Elements Fe-Cr-Al Alloy doped by Mo
Digital Vacuum Gauge
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
  • Gauge is installed on the vacuum flange (left side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
  • Accurate pressure reading with any mixed gases
Two Channel Gas Mixing Station
  • Two floating flow meters 16 to 100 mL/min flow rate range
  • Three mechanical pressure gauges (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)
  • Vacuum needle valves are made of SS304
  • Three Pipe fittings for 1/4" pipe (nylon or stainless steel) on the back panel
  • Compact size:  340Lx300Dx 180H mm ( 13.4"x12"x7")
  • Net Weight: 14 lbs
  • No power required
  • Click the pictures below to see more details

                      ( optional   click  the pic to order Constant temperature control module )

Oxygen Monitoring (Optional)
An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
Vacuum Flanges and Fittings
Structure (click on pictures to enlarge)
            Left side        Right side                       

Vacuum fittings in standard package:
Vacuum Pump

Click to see details
  • Model: EQ-2TW-4C two step high-speed vacuum pump
  • Voltage: The voltage of pump will be the same as the tube furnace.
  • Pumping rate: 8CFM, 226L/min (please click here to convert metric to English unit )
  • Vacuum level in the furnace system can reach 5x10-2 torr
  • Power: 3/4 HP (500W)
  • Oil volume: 1000ml
Net Weight 100 lbs
Product Dimensions
  • Furnace: 340 x 300 x 400 mm
  • Vacuum Pump: 440 x 160 x 300 mm
  • Gas Station: 340 x 300 x 180 mm
Shipping Weight 200lbs
Shipping Dimensions 45x45x35"
One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). 
  • Furnace:
    • CE/UL/CSA Certificate
    • Please select the certificate in options bar:
      • CE Certificate & UL/CSA ready to pass UL/CSA certificate at extra cost
      • UL certificate -  UL apprval (UL 61010)
  • Vacuum Pump:    CE Certified
Application Notes

Click here to learn the installation of a gas regulator
Operation Instructions                   

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3. The prices listed are subject to change without notice.