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Mini Plasma Sputtering Coater with Heater (up to 750°C) & Gold Target , 1.5" Max Sample -GSL-1100X-SPC12H

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Item Number: GSL-1100X-SPC12H

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ºGSL-1100X-SPC12H  is a heatable plasma sputtering coater and designed for making metallic coatings, such as gold, platinum, Indium and silver etc, on a sample up to 40 mm diameter with 300 Angstrom thickness. Especially for coating conductive gold film for SEM sample. The plasma sputtering coater is shipped with all necessary accessories for immediate use, including one sputtering head with gold sputtering target (gold cathode), Vacuum pump, stainless steel bellows, quick clamps and vapor trap.

SPECIFICATIONS

  Input Power
 208V - 240V, 50/60 Hz, < 3000W ( including pump)
  Specimen chamber
  •  Fused glass chamber, 100 mm Dia. x 130mm Height 
  •  Stainless steel flange   
  Specimen stage

 





  •  60 Diam. Heatable Sample Stage (up to 750°C)
  •  Suggest heating rate:15°C/m
  • Height is adjustable
  Vacuum Accessories
 
 

Every acessories are included for im mediate use. ( (Please click the picture left for detail )

  • Vane rotary vacuum pump 2L/sec (external ) with Pirani gauge Vapor trap prevent back streaming of oil into the vacuum chamber
  • Stainless steel bellows  with KF16 adaptor and quick clamps & vapor trap
  • Two Stage Exhaust Filter on vacuum pum to eleminate oil vapor contimination
  • High purity gold foil target
  • the system requires a Ar gas tank with pressure regulator  which is not included.

  Gas atmosphere

  One needle valve installed to allow Ar has inlet to achieve better plasma coating

  Target size

 Overall dimension

  L480mmx W320mm x H150mm
 Shipping weight 160Lbs with crating

  Net Weight

  20 kg

  Warranty &

  One year
  Certificate       certified
 
      
Conductive gold film on the
sample after 10s processing
KF-D16 pump connector
Glow discharge
Heat Controller 
 
MTI Corp. shares the most state-of-art sputter coating
technology with our customer, please click the picture
below to read the artical - Plasma Sputter Coating.



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MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA

Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
ECS 221st, Booth#208, May 7-9, 2012, Seattle,WA, USA
SVC TechCon2012, Booth# 739, May 1- 2, 2012, Santa Clara, California





 
 
 
Notices
1. The price listed on line is valid for US market  and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice