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1100°C Three-Zone Split Tube Furnace with 15“ OD Quartz tube, Flange and Electrical Lid Actuator (40''L Heating Zone) - OTF-1100X-15-III


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Item Number: OTF-1100X-15-III
Transported by LTL Freight (Truck)

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OTF-1100X-15-III furnace is a large three-zone tube furnace with 15 "O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. The electrical actuator enables an easy & hassle free lid opening. Three 30 segment programmable controllers are built in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gas conditions. It is an excellent tool for annealing, diffusing and sintering processes.

SPECIFICATIONS
Furnace structure

  • Double layer steel casing with air cooling.  The surface temperature of the case is < 70°C.
  • Refractory fibrous alumina insulation liner for maximum energy saving.
  • Heating element: NiCrAl Resistance Wire
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from inside tube.   (Ceramic blocks must be fully inserted into the furnace chamber before heating
  • This furnace can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below (for 11'' O.D tube only)
  • Electrical lid actuator provides easy & hassle free lid opening when seen through the tube chamber or tube replacement is needed.
    
Structure schematic
11" ceramic tube。 Click to order spare
Holding 8" wafer Electrical Lid Actuator
 

Heating zone
  • Total heating zone length 1000mm (40")
  • Three zones: 330 mm + 330 mm + 330mm (12" per zone)
  • Constant temperature zone: 600 mm (if three zones are in the same temperature within+/- 5°C)
Working temperature
  • Max heating temperature: 1100°C 
  • Max heating & cooling rate: 10°C/min
  • SiC heating elements, total 36 pcs 
Temperature control
  • Three digital controllers with PID/self-tuning functions and 30 segments programmable.
  • Thermocouple: three K type thermocouples (one for each zone)
    Control accuracy: +/- 1°C
  • Software for PC control is available as optional ( click picture on the left to order )
Fused quartz tube
    
  • 15" O.D x 14.6" ID quartz tube with 73" Length, please select tube size in the option bar
  • High purity quart tube, please click the bottom left picture to view.
  • Warning: quartz tube is fragile, please handle with care. Warranty does not cover broken tube by use
Vacuum sealing & Flange
  • A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump.
  • Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting.
  • Right Side Flange: KF40 vacuum port with a vacuum gauge. KF-40 Vacuum Right-Angle Valve  is optional for easy connection to KF40 bellows and pump.
  • One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
Optionals
  •                      
Rated Voltage
  • Three Phase, 208V AC, 50/60 Hz  ( 3 phase 380V is  optional)
  • AWG 8# Power cord is included (without plug) 
Power consumption
        Max. 40KW
Product Dimension
       2000 L x 765W x 1130 H mm
Net weight
        500kg
Warranty
  • One year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)
  • You may order replacement quartz tube at the link below 
Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified
                       

NOTE
Operation Instructions     
Warning
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa    or  0.12 MPa (absolute pressure). 
  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
 

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.