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1100°C Three-Zone Split Tube Furnace with 8'' or 11" Quartz tube, Flange and Electrical Lid Actuator (40''L Heating Zone) - OTF-1100X-11-III


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Transported by LTL Freight (Truck)

Product Options

Tube size:

Personalization

Upgrade to Eurotherm Temp Programmer (three zone) Upgrade + 15" Laptop + USB-to-RS485 Cable
OTF-1100X-11(8)-III furnace is a CE certified three-zone tube furnace with 8 or 11"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. The electrical actuator enables an easy & hassle free lid opening. Three 30 segment programmable controllers are built in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gas conditions. It is an excellent tool for annealing, diffusing and sintering processes.

SPECIFICATIONS
Furnace structure

  • Double layer steel casing with air cooling.  The surface temperature of the case is < 70°C.
  • Refractory fibrous alumina insulation liner for maximum energy saving.
  • Heating element: NiCrAl Resistance Wire
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from inside tube.   (Ceramic blocks must be fully inserted into the furnace chamber before heating
  • This furnace can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below (for 11'' O.D tube only)
  • Electrical lid actuator provides easy & hassle free lid opening when seen through the tube chamber or tube replacement is needed.
    
Structure schematic
11" ceramic tube。 Click to order spare
Holding 8" wafer Electrical Lid Actuator
 
Heating zone

  • Total heating zone length 100mm (40")
  • Three zones: 300 mm + 300 mm + 300mm (12" per zone)
  • Constant temperature zone length : 350 mm (if three zones are in the same temperature within +/- 3°C)
  • Cross section Temperature tolerance: +/- 3°C
Working temperature
  • Max heating temperature: 1100°C 
  • Max heating & cooling rate: 10°C/min
  • SiC heating elements, total 36 pcs 
Temperature control
 
  • Three digital controllers with PID/self-tuning functions and 30 segments programmable.
  • Thermocouple: three K type thermocouples (one for each zone)
    Control accuracy: +/- 1°C
  • Software for PC control is available as optional ( click picture on the left to order )
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 programs of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Fused quartz tube

  • Can accomodate 8'' or  11" O.D quartz tube with 71" Length, please select tube size in the option bar
  • High purity quart tube, please click the bottom left picture to view.
  • Warning: quartz tube is fragile, please handle with care. Warranty does not cover broken tube by use
Note: for the needs of higher temperature operation upto 1250C, please consider our Kanthal FeCrAl alloy tube. Please contact us for more details. Click bottom right picture to view.
    
Vacuum sealing & Flange
  • A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via a heavy-duty mechanical pump.
  • Left Side Flange: stainless steel needle valves, and 1/4" barbed hose fitting.
  • Right Side Flange: KF40 vacuum port with a vacuum gauge. KF-40 Vacuum Right-Angle Valve  is optional for easy connection to KF40 bellows and pump.
  • One 1/4" OD thermal couple insert port is built on the right flange for easy temperature calibration.
Optionals
  •                      
Rated Voltage
  • Three Phase, 208V AC, 50/60 Hz  ( 3 phase 380V is  optional)
  • AWG 8# Power cord is included (without plug) 
Power consumption
Max. 20KW (100A breaker required)
Product Dimension
2000 L x 765W x 1130 H mm

Net weight
300kg
Shipping dimension
80" x 40" x 70"
Shipping weight
1000 lbs
Warranty
  • One year limited warranty on electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)
  • You may order replacement quartz tube at the link below 
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller

        

Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified
                       

NOTE
Operation Instructions     
Warning
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa    or  0.12 MPa (absolute pressure). 
  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
 

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.