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Three Zones Tube Furnace (4") with Vacuum Pump (1.0E-5 torr) + 9 Channel Digital Gas Flow-meters for CVD - OTF-1200X-4-III-9HV
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Click to enlarge
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Call for the lead time
Item Number: OTF-1200X-4-III-9HV
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OTF-1200X-4-III-9HV is CE certifed 4" diameter split three zone tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion.
Click to enlarge
Specifications
Furnace
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Structure
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Double layer steel casing with air cooling.
High purity alumia fiber board liner for energy cost effective operation.
Three heating zones with in depend temperature control.
Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel.
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Heating Element
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Fe-Cr-Al Alloy doped by Mo
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Max. Heating Temp.
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1200°C
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Continuous Heating Temp.
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1100°C
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Max. Heating Rate
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<=20°C/min
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Heating Zone Length
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Three zones: (880mm, 35" in total)
Zone 1: 220 mm + Zone 2: 440 mm + Zone 3: 220 mm
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Constant Temp. Zone
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20" (500 mm) length (three zone at equal temperature within +/- 1°C)
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Tube Size and Materials
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Fused Quartz Tube
100 mm O.D x 92 mm ID. x 1400 mm
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Temp. Controller
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Three precision digital temperature controllers programmable with 50 segments, which control each heating zone separately.
PID adjustable with auto tune function to ensure temperature stability within +/ - 1 oC.
Full protection in each controller for over-temperature and broken thermal couple.
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Thermocouple
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Three K type thermocouples
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Power Input
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AC 208~240V, Single Phase, 50/60Hz, 7KW max.
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Vacuum Fittings
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The Standard vacuum accessories include:
- Two stainless steel vacuum flanges with KF-25 pump connector, two needle valve and one 1/4" swagelok tube connector.
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Six pieceof high temperature silicone O-ring for using under 300°C.
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Two pairs of alumina thermo-blocks are included for protecting flange from heat radiation.
- One KF-40 vacuum bellows
- Three KF-40 quick clamps.
- Two KF-25 quick clamps.
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HV Station
High Vacuum Station
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Structure
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Mobile cart size: 600 (L) x 600 (W) x 700(H), mm
Max. Loading: 600 Lbs on top
Molecular pump control Panel : LCD digital
Inside: Pfeiffer vacuum pump made in Germany
Vacuum sensor is included
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| Vacuum sensor
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The vacuum sensor has a KF-25 connector.
High vacuum gauge (measuring range 10^-8
mbar ~ 10^3 mbar)
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| Control Panel
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One button operation - the diaphragm pump and the turbo molecular pump will start after pressing "start" button.
System controlled spinning speed
- the controller will control the speed of the turbine spinning up and
down according to the vacuum level and leaking rate of the reaction
chamber.
Self protection
- the system will protect the pump from damage by overheating and
over-current if the leaking rate of the reaction chamber is too high to
achieve high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
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Self testing
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Spinning up
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Error report
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Volt meter
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Full speed
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| Volume Flow Rate
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Nitrogen N2 33 L/s
Helium He 39 L/s (2340L/minute)
Hydrogen H2 32 L/s
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| Working Range
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From 1000 mbar to <1E-7 mbar
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| Ultimate Pressure
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10^-5 torr (with tube furnace)
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| Power Input
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110V AC or 220V AC switchable, 50/60Hz
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| Power consumption
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Duration/Max power: 100/110Watt
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MFC Station
Mass Flow Controller
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9 precision mass flow meters controllers are installed in bottom mobile cart with digital display panel of +/-1% of Full Scale (accuracy is within 35% - 100% of full scale).
- 3 MFC at range 0 - 1000scc
- 3 MFC at range 0 - 200scc
- 3 MFC at range 0 - 10 scc
 Click to enlarge
The flow rate control range is available for costomization. Please contact us for detail infomation.
Three mechanical pressure meters are installed in bottom mobile cart for monitoring the pressure of the mixed gases.
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Gas Pipe Connect
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- One 1/4“ swagelok tube connect is installed in the left flange as the gas inlet.
- Each MFC Station has four 1/4" swagelok tube connects. Three of them for each gas route. The other one is used as gas outlet.
- The 1/4" software gas pipe is included in the standard packge.
- [Optional] If Stainless steel 1/4" gas tube is needed, please click here to order.
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Shipping Info
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Dimension
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Furnace: 550 x 380 x 520mm
MFC Station: 600 x 600 x 700mm
HV Station: 600 x 600 x 700mm
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Weight
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Net weight: 100Kg
Shipping weight: 350 lb (two pallets)
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Warranty
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One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
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Certificate
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CE approved
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 Operation Manual
Quick test instruction
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Sale Price: USD$10,995.00
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MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
 ECS 221st, Booth#208, May 7-9, 2012, Seattle,WA, USA
 SVC TechCon2012, Booth# 739, May 1- 2, 2012, Santa Clara, California
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Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
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