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1200°C Max. 4" Tube Furnace with Sliding Flange - OTF-1200X-100-SF


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Item Number: OTF-1200X-100-SF
Transported by LTL Freight (Truck)

Personalization

OTF-1200X-100-SF is a compact 4" ID quartz tube furnace with slidable flange with 1200°C Max. working temperature, which is designed for customers to build a DIY CVD system easily. 

Specifications
Furnace Structure
Rated Voltage Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug)
Power Consumption Max. 3600 W (20 A breaker required)

Heating Zone
  • Heating zone length:  440 mm
  • Constant temperature zone: 100 mm 

Working Temperature
  • Max heating temperature: 1200°C ( < 30 minutes )
  • Continuous working temperature: 200~1100°C
  • Max heating & cooling rate: 20°C/min



Temperature Control
  • Digital controller with PID/self-tuning function and 30 segments programmable
  • Thermocouple: K type thermocouple, which is inserted from the right side flange and connected to the temperature controller.
  • Control accuracy: +/- 1°C
  • Software for PC control furnace is available as optional (click picture below to order)
  • The new version of PC module is now compatible with Lab View 05/08/2014
                




Vacuum 
and Gas Sealing & Flange
  • Right flange:
    • Water cooling structure with 12mm quick connector to prevent sealing o-ring from melting (water cooler is not included, please click water chiller to order)
    • KF25 vacuum fitting (to vacuum pump, please click to order pump,  vacuum hose, valve and sealing gasket)
    • Slidable for customer to easily and fast push/pull in/out sample
    • One quartz wafer holder ( 3" Dia. max.  ) is built in the flange with heating radiation block for CVD growth on thin substrate
    • An anti-corrosive capacitance diaphragm gauge is included
  • Left flange with four 1/8'' Swagelok fittings for 1/8'' gas tube:
    • Two separate 1/8'' fitting on the flange for any gas into the CVD furnace 
    •  and customized feedthrough is available upon request.
Net weight
100kg
Dimensions

  • Standard:    48"L X 18"W X 23"H
  • Maximum:   66"L X 18"W X 32"H  (Lid open and right-side flange slided out)

Warranty
  • One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, O-rings, and etc are not covered by the warranty)
  • You may order replacement quartz tube here: EQ-QZTube-RTP
Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass UL(UL61010), CSA or TUV certification on customer side at extra cost. ( please click marks below to learn details )
                  
Warning
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure <0.2 bars / 3 psi / 0.02 Mpa
  • AttentionA two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Please click here to learn how to install the gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 
  • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
Operation Instructions

     


Application Notes
You may add a scalable below on sliding flange at additional cost to achieve fast heating and cooling under controlled atmosphere or vacuum.  Also, you can add electric motor driven flange at the extra cost similar to the furnace below-right.
       

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.