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Single Zone Tube Furnace with High Vacuum (1E-5 torr) and Precision Gas Flow Station (1-4 chs) for CVD - OTF-1200X-HVC series
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In stock
Item Number: OTF-1200X-HVC
Personalization
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Select the chamber size and quartz tube*
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Single Zone Tube Furnace with High Vacuum (10^-5 torr) and Precision Gas Flow Station for CVD - OTF-1200X-HVC series
The OTF-1200X-HVC series furnace workstation consists of a OTF-1200X series tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.
Structure
Specifications
| OTF-1200X series tube furnace
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Casing
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Double layer steel casing with air cooling.
Built in thermostat to control Cooling running automatically when case > 55°C.
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Processing Tube
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Material: Fused quartz tube
One processing tube is included with the furnace.
Please select the tube size in the option bar to update the price.
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Power
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2.5KW
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Rated Voltage
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AC 208-240V Single phase, 50/60Hz
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Heating Element
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Fe-Cr-Al Alloy doped by Mo
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Working Temp.
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Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C
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Heat-up Rate
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Heat-up rate: 1~20°C/min programmable
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Heating Zone Length
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Total heating zone: 440mm
Constant Temp. Zone: 150mm (±1°C)
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Temp. Control
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PID automatic control via current limiting phase angle fired the resistor with 30 steps programmable segments.
Temperature accuracy: ±1°C
Thermocouple: K type built inside the furnace
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Vacuum Seal
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One pair of stainless steel vacuum flange with:
- one mechanical pressure gauge
- two needle valves
- one KF-40 connector for the high vacuum station.
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Power
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100~110W
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Rated Voltage
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AC 208-240V Single Phase, 50/60Hz
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High Vacuum Station
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Structure
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Mobile cart size: 600 (L) x 600 (W) x 700(H), mm
Max. Loading: 600 Lbs on top
Molecular pump control Panel : LCD digital
Inside: Pfeiffer vacuum pump made in Germany
Vacuum sensor is included
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Volume Flow Rate
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Nitrogen N2 33 L/s
Helium He 39 L/s (2340L/minute)
Hydrogen H2 32 L/s
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| Working Range
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From 1000 mbar to <1E-7 mbar
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| Ultimate Pressure
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<1E-8 mbar (without any leaking )
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Mass Flow Gas Control
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Structure
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Made of 316 stainless steel
Gas mixing tank: Φ80X120mm
Dimension: 600(L) x 600(W) x 700(H), mm
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| Power
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18W
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Rated Voltage
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AC 208-240V, Single phase, 50/60Hz
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Gas routes
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Please select the number of gas routes in the option bar to update the price
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MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
 ECS 221st, Booth#208, May 7-9, 2012, Seattle,WA, USA
 SVC TechCon2012, Booth# 739, May 1- 2, 2012, Santa Clara, California
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Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
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