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1200°C Dual Zone HPCVD Furnace with Sequential & Co-Deposition Source Feeding System (upto 4 Crucibles)- OTF-1200X-II-HPCVD-SE


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Item Number: OTF-1200X-II-HPCVD-SE
Transported by LTL Freight (Truck)

Personalization

Upgrade to Eurotherm Temperature Controllers (Dual zone)
OTF-1200X-II-HPCVD-SE is a dual-zone split tube furnace with the unique Source Feeding System that can drive the crucible into processing tube at desired evaporating temperature. The two-zone split tube furnace can achieve fast heating up to 1200°C and create a different thermal gradient by setting different temperature for each zone. The source feeding system can push and draw a crucible with evaporation material  through the vacuum or atmosphere controlled quartz tube and sequentially process up to four crucibles (or co-evaporating of two at a time) as programed. This is an ideal solution to conduct HPCVD experiments, especially for preparing multi-layer 2D crystal materials. Its built-in PLC touchscreen allows users to manage the feeding method and monitor the temperature of each source. Two 30-segment programmable PID temperature controllers provide excellent control without temperature overshooting

SPECIFICATIONS:
Furnace Structure
  • Features a unique Dual Channel source feeding system which drives crucibles with evaporation material  through the vacuum or atmosphere controlled tube, suitable for Hybrid Physical CVD-Growth of Multi-layer Film Stacks as programed.
  • Two independent temperature controllers to control each zone's temperature.
  • Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
  • High purity fibrous alumina insulation for maximum energy saving.
  • The special refractory coating on liner and heating element help increase furnace service life.
  • Split cover with Interlock protectioncut the power if door open during furnace heating process.
                  
Power Requirement
  • Single Phase 208~240VAC, 3KW (20Amp circuit breaker is required)
Heating Zone Length
  • Two zones: each zone length is 8.6" (220 mm)
  • Total 17.3" (440 mm) heating zone
Constant Temp. Zone
  • Constant temperature zone ( about 260mm +/-2°C ) can be created by setting both zones at the same temperature 
  • Please click the picture in below to see detail temperature uniformity profile at 800°C.
           
Temperature Range 100~1100°C (Continuous); 1200°C (<1 hour) 
Max. Heating Rate ≤ 10°C /min
Sequential Source Feeding System
  • One thermocouple connects to the crucible from the left flange. The stepper motor drives the crucible to travel through the tube together with the thermocouple for real-time temperature monitoring.
  • Four crucibles can be simultaneously placed into the source feed system and sequentially delivered to the quartz tube under vacuum or inert gas conditions (or co-depostion upto 2 sources at a time, please refer to bottom right picture for details)
                      
                  
Crucible Movement Control
  • The crucible moving speed and distance are controlled by a stepper motor.
  • Crucible travelling distance: 530mm max.
Temperature Controllers
  • 2 MET certified digital controllers with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1ºC temperature accuracy.
  • Two K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace can be operated by PC with MTS02-Y Temperature control software package (include 2 communication chips and one 15" laptop). 
    • The new version of PC module is now compatible with Lab View 05/08/2014
                     
Heating Element Fe-Cr-Al Alloy doped by Mo
Tube Accessories
  • One fused quartz tube (60mm O.D. x 54mm I.D. x 1000mm L) is included.
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
  • Quartz block (Optional) is ideal for more cleanness and higher achievable vacuum, available at extra cost.
                          
Digital Vacuum Gauge
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
  • Provides a wide range (3.8E-5 ~ 1125 torr) of measurement.
Vacuum Pump

Gas Flow Control System
Dimensions

   2400mm(L) x 600mm(W) x 1300mm(H)   
Warranty One year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings are not covered by the warranty, please find the replacements at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller

        

Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. (please click marks below to learn details)
                      
Application Notes

  
Click here to learn the installation of a gas regulator.
Operation Instructions

How to operate the furnace Controller Operation Demo Video How to create Temperature gradient
       

            

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