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Plasma Enhanced Dual Sliding Tube Furnaces with Gas Delivery & Glovebox System - OTF-1200X-PESDFG-50


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Item Number: OTF-1200X-PESDFG-50
Transported by LTL Freight (Truck)
OTF-1200X-PESDFG-50 is a customized plasma enhanced dual sliding furnaces with gas delivery system. The 2" quartz processing tube is connected to a glovebox with purificationg system which allow user move sample out from the furnace into glovebox directly under the protective gas condition.  RF plasma enable the process at lower temperature and shorter time. Two sliding heaters can create faster heating and cooling. This is an advanced solution for researching new generation nanomaterials or 2D crystals.

Specifications

Furnace Structures

  • Two sliding OTF-1200X-S split tube furnaces are installed on the sliding rail for fast heating and cooling
  • Max 1100ºC for continuous heating
  • Two precise digital temperature controllers with 30 segments programmable for independent temp. control of two furnaces.
  • RS485 port and software are installed which allows remote temperature control via PC.
  • The input power of furnace: 208 – 240V AC input, single phase at max. 4KW
Plasma RF Power Supply

  • Output Power:           5 -300W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:      200W max.
  • Matching:                  Automatic
  • RF Output Port:         50 Ω, N-type, female
  • Noise:                       <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz
Vacuum Pump Station and Valves

Mass Flowmeters & Gas Mixing Station

   

  




  • Four channels MFC gas delivery system is controlled by a touch screen panel
    • Working Temperature: 5~45 ºC
    • Max. Pressure: 3x10Pa
    • Accuracy: ±1.5% FS
    • Duplicate accuracy: ±0.2%F.S.
  • Controlling Range:
    • Controller 1: 0~100 SCCM
    • Controller 2: 1~199 SCCM
    • Controller 3: 1~199 SCCM
    • Controller 4: 1~499 SCC
  • Click picture left-below to order bubbler, evaporator for CVD, and pressure control module
              
Processing Tube
&
Flanges
  • High purity 2"quartz tube"   Size:  50mm O.D x 44mm I.D x1800 mm Length  ( click Picture bottom- left for spare )
  • Hinged type vacuum flanges with vacuum gauge are installed on the tube for easy sample loading/unloading.
        
Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
Glovebox with Purification System
  • Heavyduty vacuum Glove Box:  EQ-VBG-3    Dimensions: 780mm(L) x 700mm(W) x 650mm(H)
  • EQ-RMP-2-LD purification system to remove O2 and H2O < 2 ppm
  • Vacuum tigten flange on leftside to connect 2" quartz tube from furnace
               containment chamber VGB-4P          
Warranty
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).




Compliance
  • CE Certified
  • All electric components ( >24V) of the furnace are UL / MET / CSA certified, not including the gas mixing system, vacuum system, and plasma generator
  • The furnace is ready to  pass TUV(UL61010) or CSA certification at extra cost.( please click marks below to learn details)
               
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • MTI reserves the right to modify its PE-CVD design at any time without notice, but promises quality in future designs meet and exceed the specifications above.
  • For operating PECVD system with tube size larger than 4", please always keep more than 1-meter distance from the plasma source after the plasma generator starts working
Operation Insturctions
   

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.