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Compact 5" Split Vacuum Furnace with Sealing Flanges ( 1200°C Max ) - OTF-1200X-S-5

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In stock
Item Number: OTF-1200X-S-5
Transported by LTL Freight (Truck)

Personalization

Upgrade to Eurotherm Temperature controller + USB-to-RS485 cable
OTF-1200X-S-5 is a UL certifiable compact and energy saving (3000W power consumption) split tube furnace with a max. working temperature of 1200°C (Since 2016.11.08) and All electric parts are UL / MET / CSA certified. The furnace adopts a 5" (130mm) O.D quartz tube with a pair of stainless steel vacuum sealing flanges. The 1/4" barb fitting for rubber hose connection allows heating sample in the vacuum or flowing gas. The built-in precision temperature controller can provide up to 30 segments of heating and cooling steps with +/- 1 °C accuracy. The furnace can anneal wafer up to 4 "diameter.
02/06/17 change model# from OTF-1200X-5S to OTF-1200X-S-5

SPECIFICATIONS:

Furnace Structure
 
  • Double layer steel structure.
  • High purity Al2O3 fibrous insulation with Max. energy saving.
  • High purity alumina coating on refractory ceramics for longer service life.
  • This furnace can be converted into a vertical furnace upon request.
  •   
Power 
3 KW
Voltage
220VAC 50/60Hz
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1000°C (continuous)
Max. Heating Rate
≤ 20 °C/min
Heating Zone Length

  • 12 " (300mm), single zone.
  • Constant Temperature Zone
    • 100 mm length (+/-1ºC )( click drawing below for temp profile )
    • 140 mm length (+/-2ºC ): ( click drawing below for temp profile )
Temperature Controller
Unit

  • PID automatic control via solid state relay with 30 steps programmable.
  • Built in Over Temperature and Thermocouple Failure Protection.
  • Optional: The furnace may be operated by PC with installing a control module. Please order an MTS02-B control module at extra cost. 
                       
Advanced Temperature Controller (Optional)
  • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
  • You may upgrade the temperature controller to the Eurotherm 32H8 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 32H8 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 32H8 temperature controller.
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo
Tube Size
Vacuum Sealing
              
Left Flange     Right Flange



  • One pair of SS 304 vacuum flange with double high-temperature silicone O-ring is Included. (With support fixture )( click pic left for detail ).
    • KF25 port is built in right side flange to connect a vacuum pump.
    • Vacuum gauge, gas inlet valve, and spare 1/4 thermal couple feedthrough are built in left side flange.
  • Vacuum level can reach 10-2torr (by a mechanical pump).
 
 
Fitting Ports
&
Optional Parts
  • You may need a vacuum valve at the vacuum portend ( click picture left to order ).
  • You may click the pictures in below to order furnace with a vacuum pump and a temperature calibration kit.
  •             
Pressure Measurement / Monitoring
  • Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa is included.
  • OPTIONAL: A gas-type independent (above 10mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.
                      
Optional Insertable Thermocouple

 
  • A K-type insertable thermocouple can be inserted through the flange to monitor the temperature inside the tube. Click the picture below to order
  • Heating furnace is available for spare and replacement ( click on the right most picture below).
  • You may order flange support to avoid tube rotating ( click Pic below right )
                          
Dimensions

Main furnace with lid closed: 440mm(L) × 440mm(D) × 460mm(H)
With flange support (260mm each), total: 960mm(L) × 440mm(D) × 460mm(H) 

Main furnace with lid open : 440mm(L) × 440mm(D) × 700mm(H)
With flange support (260mm each), total: 960mm(L) × 650mm(D) × 700mm(H)

Temperature Controller Unit: 260mm(L) × 350mm(D) × 410mm(H)
Net Weight of Furnace
48 Kg
Shipping Weight & Dimensions
228 lbs; 48"x40"x37"
Warranty 
One year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order replacements at related products below.) 
Laptop, software & WiFi Control(Optional)
  • Laptop, software & WiFi Control(Optional)Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller

        



Compliance
  • CE Certified
  • All electric components (>24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (Click marks below to learn details.)
  • Please choose certification type from product option bar
            
Application Notes & Warning

  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°C The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube.
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • How to set up a ceramic tube and vacuum flange for MTI tube furnaces.
  • For safety, you may consider putting the small tube furnace inside a fume hood. ( click picture left to see )
Operation Instructions

          Demo Video                                                                                              

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1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.