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Compact 5" Split Vacuum Furnace with Sealing Flanges ( 1200°C Max ) - OTF-1200X-S-5

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Item Number: OTF-1200X-S-5
Transported by LTL Freight (Truck)


Upgrade to Eurotherm Temperature controller + 15" Laptop + Accessories Kit
OTF-1200X-S-5 is a UL certifiable compact and energy saving (3000W power consumption) split tube furnace with a max. working temperature of 1200°C (Since 2016.11.08) and All electric parts are UL / MET / CSA certified. The furnace adopts a 5" (130mm) O.D quartz tube with a pair of stainless steel vacuum sealing flanges. The 1/4" barb fitting for rubber hose connection allows heating sample in the vacuum or flowing gas. The built-in precision temperature controller can provide up to 30 segments of heating and cooling steps with +/- 1 °C accuracy. The furnace can anneal wafer up to 4 "diameter.
02/06/17 change model# from OTF-1200X-5S to OTF-1200X-S-5


Furnace Structure
  • Double layer steel structure.
  • High purity Al2O3 fibrous insulation with Max. energy saving.
  • High purity alumina coating on refractory ceramics for longer service life.
  • This furnace can be converted into a vertical furnace upon request.
3 KW
220VAC 50/60Hz
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1000°C (continuous)
Max. Heating Rate
≤ 20 °C/min
Heating Zone Length

  • 12 " (300mm), single zone.
  • Constant Temperature Zone
    • 100 mm length (+/-1ºC )( click drawing below for temp profile )
    • 140 mm length (+/-2ºC ): ( click drawing below for temp profile )
Temperature Controller

  • PID automatic control via solid state relay with 30 steps programmable.
  • Built in Over Temperature and Thermocouple Failure Protection.
  • Optional: The furnace may be operated by PC with installing a control module. Please order an MTS02-B control module at extra cost. 
Advanced Temperature Controller (Optional)
  • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
  • You may upgrade the temperature controller to the Eurotherm 32H8 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 32H8 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 32H8 temperature controller.
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo
Tube Size
Vacuum Sealing
Left Flange     Right Flange

  • One pair of SS 304 vacuum flange with double high-temperature silicone O-ring is Included. (With support fixture )( click pic left for detail ).
    • KF25 port is built in right side flange to connect a vacuum pump.
    • Vacuum gauge, gas inlet valve, and spare 1/4 thermal couple feedthrough are built in left side flange.
  • Vacuum level can reach 10-2torr (by a mechanical pump).
Fitting Ports
Optional Parts
  • You may need a vacuum valve at the vacuum portend ( click picture left to order ).
  • You may click the pictures in below to order furnace with a vacuum pump and a temperature calibration kit.
Pressure Measurement / Monitoring
  • Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa is included.
  • OPTIONAL: A gas-type independent (above 10mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.
Optional Insertable Thermocouple

  • A K-type insertable thermocouple can be inserted through the flange to monitor the temperature inside the tube. Click the picture below to order
  • Heating furnace is available for spare and replacement ( click on the right most picture below).
  • You may order flange support to avoid tube rotating ( click Pic below right )

Main furnace with lid closed: 440mm(L) × 440mm(D) × 460mm(H)
With flange support (260mm each), total: 960mm(L) × 440mm(D) × 460mm(H) 

Main furnace with lid open : 440mm(L) × 440mm(D) × 700mm(H)
With flange support (260mm each), total: 960mm(L) × 650mm(D) × 700mm(H)

Temperature Controller Unit: 260mm(L) × 350mm(D) × 410mm(H)
Net Weight of Furnace
48 Kg
Shipping Weight & Dimensions
228 lbs; 48"x40"x37"
One year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order replacements at related products below.) 

  • CE Certified
  • All electric components (>24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (Click marks below to learn details.)
  • Please choose certification type from product option bar
Application Notes & Warning

  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°C The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube.
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • How to set up a ceramic tube and vacuum flange for MTI tube furnaces.
  • For safety, you may consider putting the small tube furnace inside a fume hood. ( click picture left to see )
Operation Instructions

          Demo Video                                                                                              

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