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1200°C Compact Magnet Driven Sliding Tube Furnace for DVD & RTP- OTF-1200X-S-DVD

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In stock
Item Number: OTF-1200X-S-DVD
Transported by LTL Freight (Truck)
OTF-1200X-S-DVD is a compact megnet driven sliding 2" tube furnace with a max. working temperature of 1200°C, which is designed for direct vaporizing deposition (DVD)  or rapid thermal processing (RTP) under various atmosphere for 2D material growth.  

SPECIFICATIONS:
Furnace Feature


    

  • One high thermal conductivity Alumina flat sample holder (2"Lx1"W)  is fixed on K type sample, and the thermal couple with the sample holder can be moved  inside quartz tube driven by a magnet manually to find desirable temperature position inside tube for evaporation or deposition. 
  • One NIST certified precision temperature monitor is connected to thermal couple and sample holder via a feedthrough on the vacuum flange.
  • One magnet is embedded inside thermal block, and another magnet is placed outside tube.  move the outside magnet can move the sample holder with thermal couple inside tube in or out
  • 30 segment programmable temperature controller is built in furnace to set up Max. working temperature up to 1200oC at center of furnace
  • One small quartz crucible is included, which can be used to contain evaporation material or please wafer on top for deposition based on your application.   
Furnace Power 
  • 110VAC or 208 - 240 VAC, 50/60Hz   (Please confirm voltage when place order )
  • 1.5 KW
Max. Temperature
1200°C (<1 hour)
Continuous Temperature
1100°C ( continuous)
Max. Heating Rate
<= 20 °C/min
Heating Zone

  • Heating Zone Length:  8" (200mm), single zone. The following picture shows the temp. distribution across the heating zone, please click to enlarge.
  • Constant Temp. Zone:    2.3" (60mm)  (+/-1°C) @ 1000 °C 
  • You shall measure furnace temperature profile for your own application before making film growth.
         
Temperature Controller
       
  • PID automatic control via solid state relay with 30 steps programmable
  • Built in Over Temperature and Thermocouple Failure Protection
  • Optional:  The furnace may be operated by PC with installing a control module. Please order a MTS02-B control module at extra cost.             
Temperature Accuracy
+/- 1°C
Heating Elements
Fe-Cr-Al Alloy doped by Mo


Tube Size
  • 2" quartz tube (50mm O.D x 44mm I.D x 1000mm L) 
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from tube chamber. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
  • One small quartz boats  is included for placing sample or evaporation materials.
        1       click here to choose other size crucible
 
Vacuum Flanges
  
 
2" default flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert) and a KF25 vacuum port(click picture below to see details )
       
Vacuum Level
10-2torr (by mechanical pump)
 
 
Fitting Ports
      &
Optional Parts
  • You may need a vacuum valve at the vacuum port end ( click picture left to order )
  • You may consider to order  quick connecting flange at extra cost.
  • You may order multi-channel gas delivery system for DVD or CVD operation.
  •              
Dimensions
With lid close: 1055mm (L) × 300mm(W) × 400mm(H) 
With lid open: 1055mm (L) × 300mm(W) × 560mm(H)
Net Weight
22 Kg
Shipping Package Size
48''(L) x 24''(W) x 28''(H)
Shipping Weight
120 lbs
Warranty 
One year limited warranty with lift time support (Consumable parts such as processing tubes and O-rings are not covered by the warranty, 


Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. ( please click marks below to learn details )
                       
Application Notes


Click here to learn the installation of a gas regulator
Operation Instructions            

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.