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1200°C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD - OTF-1200X-S-50-DFSL


In stock
Item Number: OTF-1200X-S-50-DFSL
Transported by LTL Freight (Truck)

Personalization

OTF-1200X-S-50-DFSL is  a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min.  Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.

SPECIFICATIONS

Furnace Structure

  • Both furnaces are double layer steel structure with 1200°C max. working temperature
  • Each Furnace has 200mm heating zone and 60 mm long constant temperature zone
  • One pair of sliding rails are installed on bottom of furnace, which allows furnace to be manually moved from side to side with max sliding distance 400 mm.
  • Vacuum flanges is installed  for immediate use.

Power of furnace

 2.5 KW in total
Voltage  AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required

Max. Temperature

1200°C (<1 hour)

Continuous Temperature

1100°C

Heating & Cooling Rates


  Heating Rate:
 15°C/sec (RT - 150°C);
 10°C/sec (150°C - 250°C);
  7°C/sec (250°C - 350°C);
  4°C/sec (350°C - 500°C);
  3°C/sec (350°C - 550°C);
  2°C/sec (550°C - 650°C);
  1°C/sec (650°C - 800°C);
 
0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);

1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
Note:
The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length

200mm( ~8")  for each furnace

Constant Temperature Zone

60 mm (+/-1°C @ 400-1200°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

High purity fused quartz tube

Size:  50mm O.D x 44mm I.D x1400 mm Length 

Temperature Controller

  • Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in over temperature alarm and protection allows for operation without an attendant.
  • Two K-type thermal couples are included. 
  • Optional:  
    • The furnace may be operated by PC by installing control module. Please order an MTS-02 control module at extra cost. 
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer (laptop) from us to avoid software installation problems. For more information please click here.
           

Temperature Accuracy

+/ - 1°C

 Vacuum Flanges

  • Stainless steel vacuum flanges with a vacuum gauge ( click picture bottom left to see details) are installed on both ends of the tube with heavy duty support. 
  • Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost. ( click picture bottom right to see details)
             
 Sliding Rails / Table
  • Double sliding rail made by Cr-plated steel
  • Sliding length: 1200 mm
  • Two slide stopping clamps are included for holding the position of the furnaces.

 Vacuum Level 

  • Limited by pump ( pump is not included, click on pictures to order )
    • 10E-5 torr can be achieved via molecular pump
    • 10E-2 torr can be achieved via a mechanical pump.
               

Optional for upgrate

  • Motorized sliding is available upon request ( please click bottom left picture )
  • 1-9 chaanel gas mixing and delivery moudles is availle ( click the picture 2nd picture in below to order )
  • 100W - 500W  RF plasma generator for plasma enhanced processing is available upon request ( click picture bottom right to see detail ). This module allows you build your own Plasma Enhanced Thermal CVD system
                       

 Dimensions

  • Furnace: 340 x 300 x 400 mm
  • Total:1600 x 430 x 500 mm ( furnaces + sliding )
  •    

 Net Weight

~ 80 Kg

Shipping Package Size

70" x 45" x 45" (inch)

Shipping Weight

300 lbs

Warranty

One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Compliance

  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details )
                        

Application Notes

Click here to learn the installation of a gas regulator

  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
  • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.

Warning

  • Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gears such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

Operation Instructions

            

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.