Browse Categories
Search

1200ºC Max. PECVD Split Tube Furnace ( 2'' - 3.14'' OD) w/ 4 Channels Gas Delivery & Vacuum Pump - OTF-1200X-PEC4LV


Transported by LTL Freight (Truck)

Product Options

by tube size:

Personalization

Upgrade to Eurotherm Temp Programmer (single zone) Upgrade + 15" Laptop + Accessories Kit
OTF-1200X-PEC4LV is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 2"  or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump.   The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) to a solid state, and benefits:
  • Lower temperature processing compared to conventional CVD. 
  • Film stress can be controlled by high/low frequency mixing techniques. 
  • Control over stoichiometry via process conditions.
  • Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Specifications:
  Split Tube furnace
 
  • 1200oC Max. working temperature for < 60 minutes
  • 1100oC Max for continuous heating
  • 30 segments programmable precision digital temperature controller
  • 440 mm length single heating zone and 150 mm length constant temperate zone
  • High purity quartz tube optional from ( click optional bar to choose )
    One pair of vacuum sealed flange with valves
    • 2"OD x 1.7"ID x  48" Length 
    • 3.14"OD x 2.83"ID x 48'' Length
  • Input power: 208 – 240V AC input, single phase at max. 4KW
Plasma RF Power Supply
 
     
  • Output Power:          5 -300W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:     200W max.
  • Matching:                Automatic
  • RF Output Port:       50 Ω, N-type, female
  • Noise:                    <50 dB. 
  • Cooling:                  Air cooling.
  • Power:                   208-240VAC, 50/60Hz
  • Note:                      This RF power supply can accept 50 - 80 mm Max. quartz tube  by changing flange
Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detail spec
  Vacuum Pump and valve
 
  • Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr.
  •  KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
  •  Digital vacuum pressure gauge and display are installed with the furnace
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torrs.
Optional Oilless Pump
Please order the oilless pump for zero contamination:
Mass Flowmeter
    
 EQ-GSL-LCD  
   
  • 4-Channelled Gas Mixing
  • Made of 316 stainless steel valve
  • Gas mixing tank: Φ80X120mm  
  • 600mm(L) x 745mm(W) x 700mm(H)
  • 6" color touch screen control panel to make parameter setting at easy.
  • Touchscreen Control and PC remote switchable.
  • 23W per channel
  •  AC 220V/50Hz Single phase
Temperature Controller
  • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. 
    • You may upgrade the temperature controller to the Eurotherm 3204 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3204 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3204 temperature controller.
  •             
Optional
                               click here to choose a crucible
Overall dimensions
  • Furnace: 550mm(L) x 380mm(W) x 520mm(H) 
  • 2 Bottom Mobile case together: 1200mm(L) x 1200mm(W) x 1200mm(H)
  • Net weight: 220 lbs
  • Shipping weight: 350 lbs
Warranty 
One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)


Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified, not including the gas mixing system, vacuum system, and plasma generator
  • The furnace is ready to  pass TUV(UL61010) or CSA certification at extra cost.( please click marks below to learn details )
             
Patten Number: ZL-2011-2-0355777.1 
Operation Instruction

        
Warning

Click here to learn the installation of a gas regulator
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  • MTI reserves right to modify PECVD design at  any time without notice but promise that quality will meet the specifications above
Shipping Dimensions
  • Pallet #1: 48" x 40" x 60"
  • Pallet #2: 48" x 40" x 40"
  • Pallet #3: 48" x 40" x 40"
  • Pallet #4: 48" x 40" x 40"
Total Shipping Weight 500 kg (1100 lbs)

Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsors MTI-UCSD Battery Fabrication Lab:
MTI-UCSD Battery Fabrication Lab Opening


MTI sponsors MRS and ECS Postdoctoral Award:

MTI Sponsors the Postdoctoral Awards

Upcoming Shows:
BPS 2018 62nd Annual Meeting Biophysical Society Feb 17-21 San Francisco CA Booth 909

2018 SME Annual Conference & Expo Feb 25 - 28 Minneapolis, MN Booth 701

APS March Meeting 2018 Mar 5-9 Los Angeles CA Booth 123

TMS 2018 147th Annual Meeting Exhibition Mar 11-15 Phoenix AZ Booth 500

Recent Attended Shows:
2017 MRS Fall Meeting and Exhibit Nov 26 - Dec 1 Boston, MA

Click here to see our past conferences

 

Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.