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1200ºC Max Two Zone PECVD Tube Furnace (50 mm OD) with Pre-Heater and Auto- Sliding - OTF-1200X-II-50-PEMSL


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Item Number: OTF-1200X-II-50-PEMSL
Transported by LTL Freight (Truck)
OTF-1200X-II-50-PEMSL is a dual zone PE-CVD tube furnace system which consists of 300W RF plasma source, speed controlled slidable mechanism, a pre-heater for sublimating the solid material and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire and for CVD coating of a wide range of material with the following benefits:
  • Lower temperature processing is required compared to the conventional CVD
  • High heating & cooling rate using sliding furnace
  • Dual heating zone to create thermal gradient up to 500ºC 
  • 1100ºC Max. working temperature in the tube furnace
  • 1100ºC Max. working temperature in pre-heater for heating vapor phase or evaporating solid materials
  • Rapid cooling & Heating for growing 2D  materials
SPECIFICATIONS:
Dual Zone Split Tube furnace 


  • Max 1100ºC for continuous heating
  • Two programmable precision digital temperature controllers with 30 segments.
  • Two separate controlled Heating Zones
    • 200mm length for each heating zone
    • 400mm total in heating length
    • 250mm constant central temperature heating area if both zones were heated at the same temperature
    • 500ºC max temperature difference between two zones with thermal blocks in between
  • Input power: 208 – 240V AC input, single phase at max. 4KW

Plasma RF Power Supply
 
  • Output Power:           5 -300W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:       200W max.
  • Matching:                  Automatic
  • RF Output Port:         50 Ω, N-type, female
  • Noise:                       <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz
Pre-heating furnace

  • Small tube furnace with 200mm length single heating zone
  • Max. temperature:  1100ºC
  • 30 segment programmable temperature control
  • Vapor go through the heater first before get in RF Plasma generator.
  • Can put solid material in the heater for evaporation and mixing with vapor phase.
  • Quartz Tube:   50mm OD x 44mm ID x 2200 mm L   ( 80mm OD tube is available at extra cost)
  • Vacuum flange:  included 
  • Quartz Tubes
Anti-corrosive Pressure Gauge

  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detail spec.
Oil-less Vacuum Pump Station and Valves
 
 
Sliding mechanism
  • Sliding rail and screw are built in the bottom furnace, which can move from one side to another as a program to achieve faster heating or cooling.
  • Sliding speed is adjustable from  0-70 mm/s

Heating & Cooling Rates
  • RS485 port and software are installed and allow remote control temperature profile by PC (not included, customer can order one from here)
  • In order to achieve Max.heating rate,  the user must preheat furnace to desired temperature , then slide the furnace to the sample zone of the tube
  • In order to achieve the Max. cooling rate, push the heated furnace from hot zone to cold zone
Heating Rate: 
15°C/sec (RT - 150°C);
10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);




Optional


                    
  • Two - Four precision mass flow meters (0.02% accuracy) with digital displays are available as options, which can replace the bottom case to control gas flow rate automatically with the system. Please click the picture below left to choose one at your budget.
  • Click picture below - left to order bubbler or evaporator for CVD, and  below right for Constant temperature control module
                            
 

Overall Dimensions
  • Furnace: 550 x 380 x 520  mm 
  • Sliding Rail: dual rail with 1750 mm length
  • Two Adjoined Bottom Mobile Cases: 1200 x 1200 x 1200mm.
  • Net weight: 220 Lbs.
  • Shipping weight: 1200lbs.
Warranty
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller

        

Compliance
  • Built-in Pfeiffer's pump is ELT Certification
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010)  or CSA certification at extra cost. ( please click marks below to learn details )
      
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
  • MTI reserves the right to modify its PE-CVD design at any time without notice but promises quality in future designs meet and exceed the specifications above.
Operation Insturctions
    

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.