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33 L/s Compact Turbo Vacuum Pump System (up to 1E-7 mbar) with Gauge, Valve & SS Bellows - Made in Germany - EQ-PV-HVS-LD


In stock
Item Number: EQ-PV-HVS-LD
Transported by LTL Freight (Truck)

Personalization

World-famous Pfeiffer vacuum station made in Germany consists of diaphragm pump as backing pump and turbo-molecular pump, with complete accessories,
including vacuum gauge with KF25 port ,  SS vacuum bellows with KF40 port,  & LCD digital display and ball valve together, right now bring the customer
a plug-and-play system with vacuum range from 1E-3 to 1E-7 mbar, which means the customer just presses the power switch and then get high vacuum level
in short time at very low noise.  It is an ideal tool for most of MTI's tube furnace to achieve high vacuum >10-5 torr.
 
Specifications:
  Connection
  • Molecular pump with KF40 to T type of Vacuum Tube and KF25 to Vacuum Gauge
  • Vacuum gauge with KF25 port to install to T -tube
  • Right angle high vacuum valve with KF40 port, which connects between  T- vacuum tube and SS vacuum bellows
  •  600 mm length SS vacuum bellows with KF40 port to connect to furnace flange
  • One  KF40 to KF25 adapter is included to connect the pump to MTI's furnace which has KF25 port on flange
  • Please click the picture left to see detailed information:

Ultimate Pressure

  <7.5E-9Torr (1E-6Pa) without any leaking

Start-up Time

   2 Min.

Working Range

   From 750Torr to <7.5E-8Torr (1E5Pa ~ <1E-5Pa)

Backing Pump's Pumping Speed    0.9m^3/H (15L/min) at 50Hz and 1.0m^3/H (16.6L/min) at 60Hz
Turbo Pump's Pumping Speed
  • Nitrogen    N2     33 L/s
  • Helium      He     39 L/s      ( 2340L/minute)
  • Hydrogen  H2     32 L/s
For customer's reference:
1. Please go to bigger pump HVS-3 for bigger volume over 10L in volume, this pump is too small to vacuum MTI's tube or other chambers over 10L
2. The station's total pumping speed can not be simply equal to the Backing Pump Speed + Turbo Pump Speed, see below table for vacuum rate reference 

Time ( Minute(s) )
Pressure (Torr)
Time ( Minute(s)  Pressure (Torr)
0
760 (Atmosphere)
5 1.37 x 10^-2
1
15
6 1.29 x 10^-2
2
2.70 x 10^-2 15  6.7 x 10^-3 
3
1.66 x 10^-2 180 1.05 x 10^-5

Current

4A max. 

Mains Connection

90-132 V/ 185-265V (Universal)

Weight

15 Kg

Warranty  One year manufacture warranty ( The damage caused by misuse not included )  Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned below:
  • Pumping of corrosive or explosive media.
  • Pumping of condensing vapors.
  • Pumping of liquids.
  • Pumping of dust.
  • Operation with improper high gas throughput.
  • Operation with improper high fore-vacuum pressures.
  • Operation with the improper gas mode.
  • Operation with improper high levels of insulated heat input.
  • Venting with improper high venting rates.
  • Use of the vacuum pump to generate pressure.
  • The operation of the devices in areas with ionizing radiation.
  • Operation in potentially explosive areas.
  • The operation of the devices in systems where the turbopumps are subjected to im-pact-like stress and vibrations or the effect of periodically occurring forces.
  • The use of accessories or spare parts, which are not named in this manual.
Operations Manual             
Application Notes
  • To protect the environment & human health, please use Traps & Filters to minimize exhaust. 
  • To protect vacuum pump from damage by condensed vapors or small particles, please connect a cold trap or particle trap to the pump foreline ( click on the pictures below for details ).
  • MTI keeps the pump in  inventory for fastest delivery in the US, see below picture MTI is doing batch test in the lab:
                   
  • Silicon O-ring vacuum flange (for quartz tube and ceramic tube) achieves vacuum pressure up to 1E-5 torr. To obtain higher vacuum pressure (1E-6 and 1E-7torr), consider using the CF type flange. Please check our CF flange processing tube here.
  • Service for the turbo pumps is recommended every 4 years under conditions with light gas loads. 
Compliance
  • TUV Certified
  • CE Approved


Standard Package: 
 P/N
  Description
  Quantity
 Picture&Link

 EQ-KF-Valve-D40

 KF-40 Vacuum Right-Angle Valve

 1
 
 EQ-KF-Pipe-D40

 KF-40 SS Vacuum Bellows (600 mm )

 1

 

 EQ-KF-Clamp-D40

 KF-40 Quick Clamp with Rubber O-Ring

 3

 

 EQ-KF-Clamp-D25

 KF-25 Quick Clamp with Rubber O-Ring

 1
 

 EQ-KF-RT-40-25

 Reducing T-Tube : two KF40port and one KF25 port

 1
                               
 EQ-RU-KF40-25  KF40 to KF25 adapter  1
                               
 EQ-PV-Sensor Vacuum gauge with KF25  & cable   1

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