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Compact Spin Coater ( Max. 8000 rpm, 4“ wafer Max.) with 3 Sets of Vacuum Chucks & Complete Accessories - VTC-100A

Sale Price: Starting at USD$2,998.00
If you are international, please click this.
Transported by LTL Freight (Truck)

Product Options

power supply:
VTC-100A is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use.  


  • Aluminum casting case to keep spinning stable
  • Liquid disk made of Polypropylene (PP) to resist most of the corrosive solutions
  • Drainage outlet and vacuum pump connector are on back panel
  • One filter is included in standard package. It is used to connect the coater for preventing waste water flowing into the pump
  • The spin coater can be used in glovebox with Ar g or N2 gas, but pump must be put in outside glovebox via a feedthrogh).
  • One oil-less vacuum pump is included in the standard package, please click here for specification details.

Chamber  & Vacuum Chuck 

  • Chamber Diameter: 145 mm
  • 3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in different sizes (1'', 2'' and 4'')
  • 1 piece of adhesive tape (6'' W x 24'' L) is included  for coating irregularly shaped substrates (e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction)
  • Mini suction cups are available for the small wafer with less 1" Dia. or substrate with regular  ( 5x5, or 10x10mm) or irregular shape. Please click here to order. at extra cost. ( see picture below right )
                                    (Optional; click pic to see specs and video)
Vacuum Pump
  • One 120L/min Oilless Vacuum Pump is included. (Pic.1)
  • For Ar glove box user, Please consider our 24VDC vacuum pump with no feedthrough required. (Pic.2)
  • Vacuum grade rubber pipe is included for immediate use.

Spin Speed
  • Digital control panel with two programmable segments of different spin times (1~60s) and speeds
  • 500 - 8000 RPM adjustable spinning speed  
Liquid Injecting

  • 20mL syringe is used to contain the coating material
  • The syringe holder height can be adjusted and rotated freely along the support rod
 - Pic 1   - Pic 2     
Optional  - Pic 1    - Pic 2    - Pic 3    - Pic 4     - Pic 5
Input Power 110VAC or 220VAC please select the voltage in options bar (10A fuse)
Motor Power 24V DC motor  with 150W Max. 
Product Dimensions

13''(L) x 10''(W) x 8.5''(H)
Net Weight 15 kg (33 lbs)
  • CE Certified
  • NRTL certification is available upon request at extra cost  ( Please notice us before ordering if you need NRTL )
  • One year limited with lifetime support
  • Rusting and damage due to improper storage condition or maintenance are not covered by warranty

Operation Manual & Video

Application Notes
  • Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.
  • If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
  • For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
Shipping Dimensions 40"(L) x 28"(W) x 24"(H)
Shipping Weight 46 kg (100 lbs)

Item # Description Qty
1 VTC-100A Desktop Spin Coater 1
2 4" Vacuum Chuck (pre-installed on the machine) 1
3 2" Vacuum Chuck 1
4 1" Vacuum Chuck 1
5 Plastic Glass Cover for operation safety (pre-installed on the machine) 1
6 20mL Syringe for dropping coating solvent on the plate 1
7 Hose for connecting vacuum pump 1
8 Drain Hose for water outlet 1
9 Oil-less vacuum pump, AC 110V or 220V version with Filter installed on pump as a whole set
(connect to vacuum pipe to keep water from flowing into pump) 
10 Blue Adhesive Tape (6" W x 24" L)
Optional Parts
Option Chuck O-ring For VTC200 OR VTC100 Option

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1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.