|
Programmable Vacuum Chuck Spin Coater (500-5000 rpm, 8" wafer Max) with Complete Accessories - VTC-200
|
Click to enlarge
|
Please email to info@mtixtl.com for lead time.
Item Number: VTC-200
Personalization
Optional vacuum pump (connection parts included)
|
VTC-200 Vacuum chuck Spin Coater is CE certified and designed for easy and quick coating with quality sol-gel for wafers up to 8". The spin speed is variable from 0-5000 rpm with two programmable stages of speed and time. The complete accessories are included for immediate use.
Features
- Aluminum casting case to keep spinning stable.
- One 6" vacuum chuck is included for holding 6" and 8" wafers.(If wafer size < 6", you need use 6" dia blue tape to hold smaller wafer).
- User defined time (0-60sec) and speed (500-5000RPM). Spin in single speed or two speed continuously with various time
- 1 piece of adhesive tape (6'' W x 24'' L) is included for coating irregularly shaped substrate
- One 20 ml syringe is included for ready coating.
- Flexible water pipe with switch is built in for easy washing.
- One Filter is included in the standard accessory used for connecting pump and coater to prevent waste water from flowing into pump via pipe.
Specifications
- Input Power: 110~240V AC single phase
- Motor Power: 150w
- Vacuum pressure requirement: > 160 L/ min (6.0 CFM)
- Dimension: 490mm x350mm x250mm
- Net Weight: 36 kg
- Shipping dimension: 18" x 14" x 15"
- Shipping weight: 160 lbs
- Warranty: One year
- Compliance: CE certified
Attention: The use of corrosive coating material is perhibit!
|
control panel
6" vacuum chuck
Vacuum hose & filter
|
Optionals:
1. Vacuum pump is not included, please choose a dry vacuum pump EQ-OFP-14(Do NOT use two stage, molecular vacuum pumps due to low vacuum and oil evaporation).
2. For irregularly shaped wafers, you may order blue adhensive plastic film (PVC) to hold sample on vacuum chunk
3. You may place the compact spin coater into a glove box to operate in inert gas environment. (click to enlarge picture)
4. Please choose the optional electronic pipette below as solution dispenser to accurately control the drop volume:
 View operational manual
Download catalog
(
Standard Package of VTC-200 Spin Coater
|
Name
|
Qty
|
Note
|
|
1
|
Main Machine
|
1
|
VTC-200 desktop spin coater
|
|
2
|
AC Power Cord
|
1
|
110 ~240v single phase
|
|
3
|
6" vacuum chuck
|
1
|
Installed on the machine
|
|
4
|
Plastic Cover
|
1
|
For operation safety
|
|
5
|
Syringe
|
1
|
For dropping coating solvent on the plate
|
|
6
|
Drain Hose
|
1
|
For disposing waste water
|
|
7
|
Vacuum filter
|
1
|
Connect to vacuum pipe to keep water flowing into pump
|
|
8
|
Pump pipe
|
2
|
Connect to the vacuum pump
|
|
|
| | |
|
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed. | |
| | |
|
|
MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
 ECS 221st, Booth#208, May 7-9, 2012, Seattle,WA, USA
 SVC TechCon2012, Booth# 739, May 1- 2, 2012, Santa Clara, California
|
|
|
|
|
|
|
Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
|
|
|