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Quartz Boat for Diffusion of 4"X 4" Square Wafer Processing (25 wafer / boat) - EQ-QB-4025S-LD

In stock
Item Number: EQ-QB-4025S-LD

Quantity Discounts

2 to 9USD$560.31
10 or moreUSD$530.82
  • 4" wafer boat is made of ultra-high purity quart (4N purity) with 1200oC working temperature
  • Can carry 25 piece wafers of 4" x 4" square x 0.5 mm thickness in each boat
  • Design for diffusion, oxidation and annealing 4" Si wafer
  • Can fit in MTI OTF-1200X-5L, VBF-1200X-H8, and OTF-1100X-8.5 tube furnace
  • The dimensions of the wafer boat please refer to design drawing

  • MTI Tube furnace

    4" wafer with quartz boat

    2" wafer with quartz boat can be place into 3" tube furnace

    Place 3" wafer in center of furnace


    Inspect your delivery:
    Please check package for damages before accepting delivery.
    Should damages found, please keep all packaging materials, take pictures, and report immediately to carrier/MTI.

    No Warranty:
    Kindly note this item is a consumable part, and not covered by warranty. Make sure to inspect for defect(s) thoroughly before use. 

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