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Quartz Boat for Diffusion of 4"X 4" Square Wafer Processing (25 wafer / boat) - EQ-QB-4025S

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Item Number: EQ-QB-4025S
Features:
  • 4" wafer boat is made of ultra-high purity quart (4N purity) with 1200oC working temperature
  • Can carry 25 piece wafers of 4" x 4" square x 0.5 mm thickness in each boat
  • Design for diffusion, oxidation and annealing 4" Si wafer
  • Can fit in MTI OTF-1200X-5L, VBF-1200X-H8, and OTF-1100X-8.5 tube furnace
  • The dimensions of the wafer boat please refer to design drawing


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