Browse Categories

Silicon-on-Sapphire (11-02, R Plane ), 100mm Dia x 0.5mm,1sp, Film: 0.6 um thick,

In stock
Item Number: SI-SOS100DD05C1-0.6um-US
Silicon on sapphire (SOS) is a hetero-epitaxialprocess for integrated circuitmanufacturing that consists of a thin layer (typically thinner than 0.6 micrometres) of silicongrown on a sapphire (Al2O3) wafer. SOS is part of the Silicon on Insulator (SOI) family of CMOS technologies. SOS is primarily used in aerospace and militaryapplications because of its inherent resistance to radiation.
U.S. Dept. of Commerce requires End User Certificate for exporting this product. Oversea end users must file the end user certificate form (click to download) and all sales are subject to get approval by U.S. Dept. of Commerce before shipping.
 Silicon  EPI Layer:
  • Silicon Orientation: (100)
  • Type, Dopant:  Intrinsic type, undoped
  • Silicon Thickness: 0.6um +/- 0.06 um 
  • Resistivity: >100
  • Silicon epi film on C plate sapphire is available upon request
Sapphire Wafer:
  • R plane -- (1-102)  with  single flat
  • Wafer size:   100mm  dia x 0.53 mm thickness 
  • Orientation Flat Length: 32.5mm +/-2.5mm ,
  • Flatness:10um,    Parallelism:20um
  • Polished surface:   Wafer surface is EPI polished via a special CMP procedure. 
  • One side polished
  • Projected C-Axis: 45 degree +/- 2 degree
  • Backside Surface: fine ground and etched;  Roughness: Ground-64u" Ra

Related Products

Thin Films  A-Z

Crystal wafer A-Z

Plasma Cleaner

Wafer Containers

Dicing saw

Film Coater

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop

MTI-UCSD Battery Fabrication Lab

MTI Sponsors the Postdoctoral Awards

Upcoming Shows:
MS&T 2018 Oct 14-18 Columbus OH Booth 513

2018 MRS Fall Meeting and Exhibit Nov 25 - 30 Boston MA Booth 901

APS March Meeting 2019 March 4-8 Boston MA

Recent Attended Shows:
Furnaces North America Oct 8-10 Indianapolis IN

AiMES 2018 Sept 30 - Oct 4 Cancun Mexico

Zhejiang University MSE Visiting August 10th Richmond CA

Click here to see our past conferences


1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.