Browse Categories

4" SiC-3C N type Epi Film and CMP on both sides of Silicon (100) N-type Wafer after epitaxy growth, 3.2 micron film Thickness after polishing

In stock
Item Number: C-3CP-a-101D0525C2-3.2um-US


  • Film:  SiC Epi film with 3C structure grown by PECVD
    • Thickness: 3200 nm +/- 10%    
    • Orientation:3C SiC (100)
    • Surface: CMP  ( film chemical mechanical polished )
    • Target doping level: 1.0E17 - 1.0E18 /cc (Available Doping range: 1E16 - 1E19 /cc )
    • Type and dopant:  N type, Nitrogen doping
    • Surface defects density (microscopic inspection of crystallites or other macro-defects) <= 3E3cm^2
    • TTV: 16
  • Silicon substrate:   
    • Size: 100 mm dia x 0.525 mm thickness 
    • Orientation:  (100)
    • Type:  N type / P doped 
    • Resistivity: 1- 10 (resistivities is dependent on the doping level)
    • Polish:  one side polished

    Related Products

    Thin Films  A-Z

    Crystal wafer A-Z

    Plasma Cleaner

    Wafer Containers

    Dicing saw

    Film Coater

    Shopping Cart
    Your cart is empty.
    Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
    Mailing Lists
    MTI sponsors MTI-UCSD Battery Fabrication Lab:
    MTI-UCSD Battery Fabrication Lab Opening

    MTI sponsors MRS and ECS Postdoctoral Award:

    MTI Sponsors the Postdoctoral Awards

    Upcoming Shows:
    2018 SME Annual Conference & Expo Feb 25 - 28 Minneapolis, MN Booth 701

    APS March Meeting 2018 Mar 5-9 Los Angeles CA Booth 123

    TMS 2018 147th Annual Meeting Exhibition Mar 11-15 Phoenix AZ Booth 500

    Recent Attended Shows:
    BPS 2018 62nd Annual Meeting Biophysical Society Feb 17-21 San Francisco CA

    2017 MRS Fall Meeting and Exhibit Nov 26 - Dec 1 Boston, MA

    Click here to see our past conferences


    1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor cost.
    3. The prices listed are subject to change without notice.