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Single Zone Tube Furnace (80 mm Dia, 1200C Max) with 3 Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Vacuum Gauge - OTF-1200X-80-F3LV


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Item Number: OTF-1200X-80-F3LV

Personalization

Upgrade to Eurotherm Temp Programmer (single zone) Upgrade + 15" Laptop + Accessories Kit

OTF-1200X-80-F3LV is a CE certified spiltable single zone tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3  types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

SPECIFICATIONS

Furnace Construction
  • Double layer steel casing with air cooling. 
  • Built-in thermostat automatically runs the cooling system when the case temp.  > 55°C.

Power Consumption

2.5 KW

Input Voltage

AC 208-240V Single Phase, 50 or 60 Hz

Maximum Temperature

1200 °C

Continuous workingTemperature

1100 °C

Maximum Heating Rate

<= 20  oC /min

Heating Zone Length

400 mm

Constant Temperature Zone

150mm  (+/-1°C)

Temperature Accuracy

+/- 1°C

Heating Elements Fe-Cr-Al Alloy doped by Mo

Temperature Controllers

  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
  • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. 
    • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller. 
            

Tube Size and Materials

Quartz tube: OD: 80mm x  ID: 75 mm x Length: 1000 mm

Digital Vacuum Gauge 
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
  • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
Vacuum Sealing Flanges

Two stainless steel flanges with both vacuum gauge and valve. The leaking rate of the flange is 6 mtorr/min in max. and 2 mtorr/min in stable conditions. Click the picture below to get details of both chart and data measured by CE cetified vacuum meter: 

        

Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.

Oxygen Monitoring

An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
       

Vacuum Pump

Gas Flow Meter and Pressure Meter
New Version front panel
          1) Compact direct read flow meter, 10-100 cc/min.
          2) Compact direct read flow meter, 16-160 cc/min.
          3)
Compact direct read flow meter, 25-250 cc/min.
  • Four pressure meters are installed inside the mobile cart which are able to monitor three types of flowing gas pressure as well as the pressure of mixing tank.
Valves Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately.

Dimensions

  • Furnace: 550 x 380 x 520 mm
  • Bottom Mobile case: 600 x 600 x 597 mm 

Net Weight

~ 60 kg

Shipping weight

200 lbs

Shipping Dimensions

Two cases in one pallet:  45"x45"x35" /case

Warranty

One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Compliance

 CE Certified

Application Notes

Click here to learn the installation of a gas regulator

 

Operation Instructions

        

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.