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Three Zones Tube Furnace (1200C) with High Vacuum Station (1.0E-5 torr) + 4 Channel MFC Gas Station for CVD - OTF-1200X-III-HVC-LD


In stock
Item Number: OTF-1200X-4-III-HVC4-LD
Transported by LTL Freight (Truck)

Personalization

* denotes required field

Upgrade to Eurotherm Temp Programmer (three zone) Upgrade + 15" Laptop + USB-to-RS485 Cable
Select the chamber size and quartz tube*

The OTF-1200X-III-HVC series furnace workstation consists of a OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-5 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection.The furnace comes with a 4-channel digital LED display mas flow gas control station.

Specifications

OTF-1200X-III series tube furnace




Casing
Double layer steel casing with air cooling.
Built-in thermostat to control Cooling running automatically when case > 55°C.
Processing Tube
Material: Fused quartz tube
One processing tube is included with the furnace.
Please select the tube size in the option bar to update the price.

Thermal Block Placement
       click here to choose a crucible
Power
7KW
Rated Voltage
AC 208-240V Single phase, 50/60Hz
Heating Element
Fe-Cr-Al Alloy doped by Mo
Working Temp.
Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C
Heat-up Rate
Heat-up rate: 1~20°C/min programmable
Heating Zone Length
Total heating zone: 900mm   (300mm + 300mm + 300mm)
Temp. Controller
  • Three precision temperature controllers to control three zones separately.
  • PID automatic control with 30 steps programmable segments.
  • Temperature accuracy: ±1°C
  • Thermocouple: K type built inside the furnace
Vacuum Seal
One pair of stainless steel vacuum flange with:
- one mechanical pressure gauge
- two needle valves
- one KF-40 connector for the high vacuum station.
Rated Voltage
AC 208-240V Single Phase, 50/60Hz
Dimension
1100(L) x 450(W) x 670(H), mm
High Vacuum Station
Structure
Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel :   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included
Volume Flow Rate
Nitrogen   N2     33 L/s
Helium     He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (without any leaking )
Voltage & Power 110VAC or 220VAC, 110W
Mass Flow Gas Control
Structure
Power 18W
Rated Voltage
AC 208-240V, Single phase, 50/60Hz
 Shipping & Warranty

Shipping Dimension Total Three Pallets   ( #1: 60" x 45" x 40"    #2: 48" x 40" x 42"  #3: 48" x 40" x 42" )
Shipping Weight 850 lbs
Optionals
           
Warranty
One year limited warranty
(Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty,
please order the replacement at related products below.)
Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (please click marks below to learn details)
                       
Notes
- Please click here to see our typical temperature profile calibration result at various temperature.
- In order to obtain accurate temperature inside tube furnace, you need to calibrate temperature by yourselves. Please click here to learn how.
- How to set up a ceramic tube and vacuum flange for MTI Tube furnace.

Warning

Click here to learn the installation of a gas regulator
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 
Operation Instructions

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.