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Hi-Vacuum Pumping Station with Pfeiffer Oilless Backing Pump & Turbo Pump (upto 1E-7 mbar at faster speed) - EQ-PAC-LD


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This Turbo-molecular Pumping Station consists of a high-quality Pfeiffer's High Speed ( 226L/min) Oilless Dry Vacuum Pump and a turbo-molecular pump, which provides faster speed than and enables pumping larger tube chambers up to 11" Dia. Large LCD digital can display the instant pressure reading and the information pump's running condition. Such a plug-and-play system brings the customers with vacuum range from 1E-3 to 1E-7 mbar.  600mm x 600m top table can withstand any types of equipment up to 600 Lbs.  It is an ideal tool for most of MTI's tube furnaces to achieve high vacuum >10-4 torr
 
Specifications
 
Mobile Cart Structure

  • Larger Mobile cart size: 800 (L) x 700 (H) x 600(H), mm 
  • Max. Loading:       600 Lbs on top
  • Molecular pump control Panel:   LCD digital
  • Inside:   Pfeiffer vacuum pump  made in Germany
  • Pfeiffer's High Speed ( 226L/min) Oilless Dry Vacuum Pump, 10E-3 Torr Limit. Please click the picture to the left for more product details. 
  • Combined with Pfeiffer Molecular pump, this station can provide a faster pumping speed than the standalone turbomolecular pumps and be able to vacuum larger tube chambers up to 11" Dia.
  • 600 mm length SS vacuum bellows with KF40 port to connect to furnace flange
VOLTAGE
  • Please choose the voltage from the options bar.
Control panel One button operation - the diaphragm pump and the turbo molecular pump will start after pressing "start" button.
System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self-protection - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum.
LCD screen - double lines parameters checking interface
make the working easier to be handled.
Pump and Accessories

  • Molecular pump with KF40 to T type of Vacuum Tube and KF25 to Vacuum Gauge
  • Vacuum gauge with KF25 port to install to T -tube
  •  1000 mm length SS vacuum bellows with KF40 port to connect to furnace flange
  • One  KF40 to KF25 adapter is included to connect the pump to MTI's furnace which has KF25 port on  flange

 

Volume Flow Rate
 
  • Nitrogen    N2     33 L/s
  • Helium      He     39 L/s      ( 2340L/minute)
  • Hydrogen  H2     32 L/s

Compression Rate

  • Nitrogen    N2     >1E11
  • Helium      He     6*1E6
  • Hydrogen  H2   >1E5

Ultimate Pressure

<7.5E-9Torr (1E-6Pa) without any leaking

Start-up Time

2 Min.

Working Range

From 750Torr to <7.5E-8Torr (1E5Pa ~ <1E-5Pa)

Backing Pumping Speed

0.9 m^3/H for 50Hz and 1.0m^3/H for 60Hz 

Duration /max. power

100/110 W

Mains Connection

90-132 V/ 185-265V (selectable)

Weight

50 Kg


Optional Accessories

Combinations of EQ-PAC-LD Turbo-molecular Pumping Station with EQ-VPC-MV Precision Vacuum Pressure Regulating System will be a solution for precisely controlling the vacuum pressure in a vacuum chamber/system.  Order Turbo-molecular Pumping Station with Precision Vacuum Pressure Regulating System from product options or Click the picture below for Precision Vacuum Pressure Regulating System
        


Warranty
One-year manufacturer warranty.(Attention: Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned in below, especially: 
  • Pumping of corrosive or explosive media.
  • Pumping of condensing vapors.
  • Pumping of liquids.
  • Pumping of dust.
  • Operation with improper high levels of insulated heat input.
  • Operation in potentially explosive areas.)
Application Notes
  • To protect the environment & human health, please use Traps & Filters to minimize exhaust. 
  • To protect vacuum pump from damage by condensed vapors or small particles, please connect a cold trap or particle trap to the pump fore-line ( click on the pictures below for details ).
  • Service for the turbopumps is recommended every 4 years under conditions with light gas loads. 
               
Complaince 
  • TUV Certified  ( Turbo pump )
Manual  Operation Manual from Peiffer  Catalog

 

Standard Package 

 P/N
  Description
 Quantity
 Picture&Link
EQ-KF-Valve-D40 KF-40 Vacuum Right-Angle Valve 1

 EQ-KF-Pipe-D40

 KF-40 SS Vacuum Bellows (1000 mm )

1

EQ-KF-Pipe-D25-600

KF-25 Flexible Stainless Steel Vacuum Bellow (600mm)

1

 EQ-KF-Clamp-D40

 KF-40 Quick Clamp with Rubber O-Ring

4

 EQ-KF-Clamp-D25

 KF-25 Quick Clamp with Rubber O-Ring

3

 EQ-KF-RT-40-25

 Reducing T-Tube : two KF40port and one KF25 port

1
    
 EQ-PV-Sensore  Vacuum gauge with KF25  & cable  1        

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.