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Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max) - VTC-300USS

Transported by LTL Freight (Truck)

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Heat Lamp for Substrate Heating:
VTC-300USS is a cost effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed air assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp system for substrate heating



  • Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate
  • Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate
  • The system also works on spin alone and spray alone modes
Spin Coater
  • Vacuum chunk with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square
  • One oil-less pump for the vacuum chunk is included and controlled by the spin coater
  • Spin speed: 300 - 3000 rpm adjustable
  • For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8"
Ultrasonic Spray Nozzle
  • One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included
  • Two spray nozzles with the KF-25 adapter are included. (Click first picture from right to see details)
    • One cylindrical type -- narrower spray ~20 mm diameter
    • One cone type -- wider spray ~40 mm diameter
  • Recommended compressed air pressure for aqueous solution: ~2 psi
  • One flow meter is integrated for regulating and monitoring the compressed air flow
  • Fluid viscosity range: 1 - 50 mPa·s (cP)
  • One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range
Heatable Syringe Pump
  • A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzle
  • One 50 mL syringe is included for immediate use. The unit can accommodate syringe with 0.4 - 30 mm diameter
  • Pumping rate: 0.1 - 45 mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)
  • Flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C
Heat Lamp and Control
  • Duo heat lamps (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for heating substrate by radiation (up to 65 ºC with 12" metal substrate) 

  • MTI strongly suggests you to place the spin-spray coater inside a fume hood for health and safety concerns. The spin-spray system without heat lamp can fit into MTI's bench-top fume hood (Click Pic 1 to order)
  • For the above application, an independently controlled, two-channel heatable syringe pump can be ordered at extra cost to replace the standard syringe pump (Click Pic 2 to order)
  • Cusstomized Multi spray head is available upon request ( pic 3 )
             - PIC 1    - PIC 2     Pic 3
Utility Requirement
  • Power: 208 - 240 VAC, 50/60 Hz, 3000 W in total
  • Gas: ~2 psi compressed air for the ultrasonic nozzle. Air compressor is also available for order at MTI
  • Attention: If a gas cylinder is used instead of air compressor(pic2), a two-stage pressure regulator(pic1) must be installed on the gas cylinder to limit the pressure within the required working range for safe operation. Click here to learn the installation of a gas regulator.
           pic1                pic2
Net Weight
  • 160 lbs
Shipping Weight & Dimensions
  • #1: 423 lbs, 48x40x42"

    #2: 155 lbs, 48x40x35"

  • CE Certified
  • NRTL ( UL6010) certification is available upon request
  • One year limited with lifetime support
  • Rusting and damage due to improper storage condition or maintenance are not covered by warranty
Operation Manual & Video
Application Notes

(Optional 15“ Diameter with three ultrasonic spray heads is available upon request )
  • Picture on the left shows an example of spin spray coater complete configuration
  • It is the user’s responsibility to understand the risks associated with the process and use proper protections. Solvents and chemicals used for the process may be poisonous, oxidizing, or corrosive. Spinning a large / heavy substrate at high speeds runs the potential risk of substrate flying out and shattering. User is advised to wear protective clothing, mask, goggles, and gloves. The process must be confined in a fume hood (Order at the Optional section) with proper exhaust handling capability. Keep the fume hood sash (window door) lower than the spinner stage during experiments.
  • The film coating quality depends on the solution viscosity, substrate spin speed, substrate heating, and ultrasonic spray parameters, etc. User is advised to experiment the processing parameters for best results
  • Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the liquid residues in the bow/base. For more details about the cleaning procedures, please review the cleaning instruction for the spin coaters
  • In order to achieve optimal coating quality, please consider cleaning the substrate with a plasma cleaner (Click the pictures below for more details) prior to coating. It will significantly reduce the surface tension on the substrates
Reference Articles

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1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
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3. The prices listed are subject to change without notice.